Method for forming a film, film forming device, liquid discharge device, method for manufacturing a color filter, display device having a color filter, method for manufacturing a display device, display device, and electronic apparatus

ABSTRACT

To provide a device and a method for forming a film by discharging a liquid material with a liquid discharge head or the like, such as an ink jet head, and which can reduce the unevenness resulting from variation of the amount of the discharged liquid material. To provide a device and a method for forming a film by discharging a liquid material and which can increase process efficiency while suppressing the increase of costs, even if the liquid material is discharged onto various objects.  
     When a color filter is manufactured, nozzles  27  of a liquid discharge head  22  discharge filter element materials onto filter-element-forming regions  7 . In this instance, one color of the filter element materials is discharged while the liquid discharge head  22  is swept in the longitudinal direction L of a mother substrate  12 . The other colors are discharged while the liquid discharge head  22  is swept in the width direction M of the mother substrate  12.

DETAILED DESCRIPTION OF THE INVENTION

[0001] 1. Technical Field of the Related Art

[0002] The present invention relates to a method for depositing a film,a device for depositing a film, a device for discharging droplets, amethod for manufacturing a color filter, a display device including acolor filter, a method for a manufacturing display device, a displaydevice, and an electronic apparatus, and particularly to a technique fordepositing a film by discharging droplets.

[0003] 2. Description of the Related Art

[0004] Various types of display devices using electro-optic devices,such as liquid crystal display devices and electroluminescent displaydevices (hereinafter referred to as EL devices), as display means andelectronic apparatuses having such a display device, such as cellularphones and personal digital assistants, have been generally known. Sinceit is becoming common that these display devices display color images,the display devices often include a color filter in which R (red), G(green), and B (blue) dots serving as filter elements are arrayed on thesurface of a substrate formed of glass, resin, or the like in apredetermined arrangement, such as a striped arrangement, a deltaarrangement, or a mosaic arrangement.

[0005] In an EL device capable of displaying color images, display dotscomprising R (red), G (green), and B (blue) dots serving as ELluminescent films disposed in a predetermined arrangement, such as astriped arrangement, a delta arrangement, a mosaic arrangement, or thelike between pairs of electrodes are formed on a substrate of glass,resin, or the like. The display dots each emit light havingpredetermined color and gradation by controlling voltage applied to theelectrodes from one display dot to another.

[0006] When these display devices are manufactured, the filter elementsfor colors of the color filter and the luminescent films for colors ofthe EL device are generally patterned by photolithography.Unfortunately, such a patterning step using photolithography requirescomplicated, time-consuming treatments, such as material deposition,exposure, and development. Also, the patterning step undesirablyconsumes a large amount of color materials and resist, consequentlyincreasing costs.

[0007] In order to solve this problem, a method has been proposed inwhich droplets containing a filter element material or an EL luminescentmaterial and a solvent are discharged by an ink jet technique to land onthe surface of a substrate, thus forming filter elements or luminescentfilms arrayed in a dot manner. A process of forming filter elements 303will now be illustrated in which filter elements 303 are arrayed by aink jet technique, in a dot manner as shown in FIG. 61(b), in aplurality of unit regions 302 on a so-called mother substrate 301, whichis a large-area substrate formed of glass, resin, or the like, as shownin FIG. 61(a).

[0008] In this instance, for example, while an ink jet head 306 having anozzle line 305 comprising a plurality of nozzles 304 as shown in FIG.61(c) linearly sweeps over each unit region 302 a plurality of times(two times in FIG. 61), as designated by the arrows A1 and A2 in FIG.61(b), the plurality of nozzles 304 selectively discharge ink, or afilter material, to form filter elements 303 in desired positions.

[0009] These filter elements 303 are formed by arraying colors, such asR, G, and B, in a predetermined arrangement pattern, such as a stripedarrangement, a delta arrangement, or a mosaic arrangement, as describedabove. Therefore, it is generally needed to use R, G, and B color inkjet heads 306 one by one in order to form a color filter in apredetermined color arrangement on the mother substrate 301.

[0010] In the ink jet head 306, the discharge quantity from the nozzles304 constituting the nozzle line 305 generally varies. The ink jet head306 has an ink discharge quality Q in that, for example, nozzles 304 atboth ends of the nozzle line 305 offer the largest discharge quantity,nozzles 304 in the center of nozzle line 305 offer the larger dischargequantity, and the other nozzles 304 offer the smallest dischargequantity, as shown in FIG. 62(a).

[0011] As a result, when the filter elements 303 are formed with the inkjet head 306, as shown in FIG. 61(b), dense lines, that is, stripedcolor shadings, are formed in either positions P1 at both ends of theink jet head 306 or positions P2 at the middle of the ink jet head 306,or in both positions P1 and P2. As a result, light-transmissioncharacteristics of the color filter disadvantageously have variationwhen viewd from above.

[0012] Accordingly, a method for reducing the unevenness of filmdeposition resulting from variation of the discharge quantity ofdroplets has been known (for example, refer to patent document 1 listedlater) in which while sweeping and gradually shifting in the shiftingdirection (the horizontal direction in FIG. 61(b)), the ink jet head 306discharges droplets a plurality of times to form each filter element 303(hereinafter simply referred to as the “error variance” method).

[0013] Unfortunately, the error variance method greatly increases thetimes of sweeping in comparison with the known method even if anidentical product is manufactured, thus increasing manufacturing timeand reducing production efficiency. Accordingly, in order to solve theproblem, a device is proposed (for example, patent document 2 listedbelow) in which a plurality of heads whose attitudes can be controlledare incorporated into a common carriage so that the heads sweep over awide range at a time to increase the production efficiency.

[0014] [Patent Document 1]

[0015] Japanese Unexamined Patent Application Publication No.20021-221616

[0016] [Patent Document 2]

[0017] Japanese Unexamined Patent Application Publication No.2002-273868

PROBLEMS TO BE SOLVED BY THE INVENTION

[0018] Although various attempts including the above-described methodand device are proposed in order to reduce the nonuniformity of filmdeposition or to suppress the reduction of production efficiency, it isdifficult, in practice, to sufficiently reduce the unevenness of filmdeposition extending in a striped manner in the sweeping direction ofthe liquid discharge head. In particular, as the sweeping speed is sethigher to increase productivity, the reduction of the stripednonuniformity becomes difficult even if the above-described method ordevice is employed.

[0019] On the other hand, when the plurality of unit regions 302 areformed on the mother substrate 301, different arrangement patterns (suchas a striped arrangement, a delta arrangement, and a mosaic arrangement)are formed in the unit regions 302 in some cases so that the unitregions 302 correspond to the size or shape of the display of aresulting display device. Also, in order to increase the number of theunit regions 302, the number of or the intervals between display dotshaving the same color in a certain direction on the mother substrate 301are often varied from one model to another. If the ink jet head is sweptover such a mother substrate 301 without variation, process efficiencyis undesirably reduced. In this instance, ink jet heads having differentstructures may be prepared for respective models to increase processefficiency. However, the preparation of many ink jet heads increasescosts.

[0020] The present invention is intended to solve the above-describedproblems, and an object of the invention is to provide a technique forreducing the unevenness of film deposition in a method and a device fordepositing films by discharging droplets with liquid discharge means.Another object of the present invention is to provide a device and amethod for forming a film by discharging a liquid material with a liquiddischarge head or the like, such as an ink jet head, and which canreduce the unevenness of film deposition resulting from variation of thequantity of the discharged liquid material. Still another object of thepresent invention is to provide a device and a method for forming a filmby discharging a liquid material and which can increase processefficiency while suppressing the increase of costs, even if the liquidmaterial is discharged onto various discharge objects.

MEANS FOR SOLVING PROBLEMS

[0021] In order to solve the problems, a method for forming a film bydischarging a liquid material onto the surface of an object with aliquid discharge means is provided. The method comprises: a firstsweeping step of discharging a plurality of droplets of the liquidmaterial onto the surface of the object while the liquid discharge meanssweeps over the object in a first direction with respect to the object,along the surface of the object; and a second sweeping step ofdischarging a plurality of droplets of the liquid material onto thesurface while the liquid discharge means sweeps over the object in asecond direction different from the first direction with respect to theobject, along the surface of the object.

[0022] By varying the sweeping direction of the liquid discharge meanswith respect to the object between the first sweeping step and thesecond sweeping step and setting it in the first direction and thesecond direction, respectively, so that a plurality of droplets aresequentially deposited to form each film while sweeping is performed intwo different directions, unevenness of film deposition resulting fromthe sweeping direction can be reduced. In particular, striped unevennessof film deposition extending in two different directions cancels eachother out to become inconspicuous, even if such unevenness results fromeach sweeping step. Thus, uniform film deposition can be achieved on thewhole.

[0023] Preferably, the first direction and the second direction areselected by rotating the object to orient in a direction different fromeach other between the first movement step and the second movement stepsuch that the first direction and the second direction intersect eachother. Since the orientation of the object is changed, it is notnecessary to change the sweeping direction of the liquid dischargemeans. Consequently, film deposition can be performed by a simplesystem, but not a large mechanism.

[0024] According to another aspect, the present invention provides afilm forming device comprising: liquid discharge means for dischargingdroplets of a liquid material onto the surface of an object; andshifting means for relatively moving the object and the liquid dischargemeans, along the surface of the object. The liquid discharge means isrelatively moved in at least two directions with respect to the objectalong the surface of the object, and the liquid discharge meansdischarges the droplets one after another while moving in any directionof said at least two directions.

[0025] In the present invention, the sweeping direction can be selectedfrom at least two directions, according to the film formation patternwhich will be deposited onto an object. By discharging droplets one byone while sweeping is performed in at least two directions with respectto the object, unevenness of film formation resulting from the sweepingdirection can be reduced.

[0026] Preferably, the film forming device further comprises anorientation means for orienting the object in at least two directions byrotating the object. By rotating the object with the orientation meansto orient the object, the shifting means can become a simple structurein which the shifting means drives sweeping in only one direction. Thus,a miniaturized device and a reduced cost can be achieved on the whole.

[0027] According to another aspect, the present invention provides aliquid discharge device for discharging a liquid material onto anobject. The liquid discharge device comprises a liquid discharge headfor discharging the liquid material; shifting means for relativelymoving the liquid discharge head and the object in a direction along thesurface of the object, the liquid discharge head and the object opposingeach other; and orientation means for horizontally orienting the object.The orientation means is capable of horizontally orienting the object inat least two different directions.

[0028] In the present invention, the orientation means for horizontallyorienting the object is capable of horizontally orienting the object inat least two different directions. Therefore, the sweeping direction ofthe liquid discharge head relative to the object can be selected from atleast two directions according to the arrangement of the regions on theobject in which droplets will be discharged. Thus, efficiency ofdischarge can be increased. Also, the sweeping direction of the liquiddischarge head driven by the shifting means can be varied by changingthe horizontal orientation of the object. As a result, by sweeping theliquid discharge head in two different directions to discharge dropletsonto one object for depositing a film, striped unevenness of thematerial resulting from the sweeping direction can be reduced.

[0029] Preferably, the orientation means comprises a plurality ofobserving means for observing different portions of the object. Some ofthe observing means are used in one orientation relationship and theother observing means are used in the other orientation relationship.

[0030] In the present invention, when the object is placed in differentorientations, different observing means are used from each other.Therefore, since it is not needed to expand the observing area or toshift the observing means, the cost of the device can be reduced and theaccuracy of observation can be increased.

[0031] Preferably, the observing means is capable of observing aplurality of portions of the object.

[0032] Since the plurality of observing means can each observe theplurality of portions of the object, the horizontal orientation of theobject can be precisely observed. The observing means capable ofobserving a plurality of portions of the object may include two imagingdevices.

[0033] Preferably, the observing position by the observing means isfixed in the device.

[0034] By fixing the observing position by the observing means in thedevice, no structure for shifting the observing means is needed, andthus, the accuracy of the observation can be increased.

[0035] Preferably, the two orientations are offered by rotating onehorizontal orientation of the object about 90° on the normal of thesurface of the object.

[0036] Thus, the liquid discharge head can be swept in two directionsperpendicular to each other, with respect to the object. Consequently,striped unevenness of the material resulting from the sweeping directionof the liquid discharge head with respect to the object can be reducedmost effectively.

[0037] According to another aspect, the present invention provides aliquid discharge device for discharging a liquid material onto anobject. The liquid discharge device comprises: a liquid discharge headfor discharging the liquid material; shifting means for relativelymoving the liquid discharge head and the object in a direction along thesurface of the object, the liquid discharge head and the object opposingeach other; and orientation means for horizontally orienting the object.The sweeping direction in which the liquid discharge head moves whiledischarging droplets of the liquid material onto the object and theorientation of the object oriented by the orientation means have atleast two orientation relationships.

[0038] In the present invention, the sweeping direction in which theliquid discharge head moves while discharging droplets of the liquidmaterial onto the object and the orientation of the object oriented bythe orientation means have at least two orientation relationships.Therefore, the sweeping direction of the liquid discharge head relativeto the object can be selected from at least two directions according tothe arrangement of the regions on the object in which droplets will bedischarged. Thus, efficiency of discharge can be increased. Also, thesweeping direction of the liquid discharge head can be varied to twodifferent directions with respect to the object. As a result, bysweeping the liquid discharge head in two different directions todischarge droplets onto one object, striped unevenness of the materialresulting from the sweeping direction can be reduced.

[0039] Preferably, the orientation means comprises a plurality ofobserving means for observing different portions of the object. Some ofthe observing means are used in one orientation relationship and theother observing means are used in the other physical relationship.

[0040] In the present invention, when the object is placed in differentorientations, different observing means are used from each other.Therefore, since it is not needed to expand the observing area or toshift the observing means, the cost of the device can be reduced and theaccuracy of observation can be increased.

[0041] Preferably, the observing means is capable of observing aplurality of portions of the object.

[0042] Since the plurality of observing means can each observe theplurality of portions of the object, the horizontal orientation of theobject can be precisely observed. The observing means capable ofobserving a plurality of portions of the object may include two imagingdevices.

[0043] Preferably, the observing position by the observing means isfixed in the device.

[0044] By fixing the observing position by the observing means in thedevice, no structure for shifting the observing means is needed, andthus, the accuracy of the observation can be increased.

[0045] Preferably, the two orientations are offered by rotating onehorizontal orientation of the object about 90° on the normal of thesurface of the object.

[0046] Thus, the liquid discharge head can be swept in two directionsperpendicular to each other, with respect to the object. Consequently,striped unevenness of the material resulting from the sweeping directionof the liquid discharge head with respect to the object can be reducedmost effectively.

[0047] According to another aspect, the present invention provides aliquid discharge device for discharging a liquid material onto an objectto form a film. The liquid discharge device comprises: a liquiddischarge head for discharging the liquid material; shifting means forrelatively moving the liquid discharge head and the object in adirection along the surface of the object, the liquid discharge head andthe object opposing each other; and orientation means for horizontallyorienting the object. The sweeping direction in which the liquiddischarge head moves while discharging droplets of the liquid materialonto the object is changed with respect to the orientation of the objectoriented by the orientation means, during operation.

[0048] The sweeping direction of the liquid discharge head can be variedwith respect to the object, during operation. As a result, by sweepingthe liquid discharge head in two different directions to dischargedroplets onto one object, striped unevenness of the material resultingfrom the sweeping direction can be reduced.

[0049] Preferably, the orientation means comprises a plurality ofobserving means for observing different portions of the object. Some ofthe observing means are used before the sweeping direction is changedand the other observing means are used after the sweeping direction ischanged.

[0050] In the present invention, when the sweeping direction is changed,different observing means are used between before change and afterchange. Therefore, since it is not needed to expand the observing areaor to shift the observing means, the cost of the device can be reducedand the accuracy of observation can be increased.

[0051] Preferably, the observing means is capable of observing aplurality of portions of the object.

[0052] Since the plurality of observing means can each observe theplurality of portions of the object, the horizontal orientation of theobject can be precisely observed. The observing means capable ofobserving a plurality of portions of the object may include two imagingdevices.

[0053] Preferably, the observing position by the observing means isfixed in the device.

[0054] By fixing the observing position by the observing means in thedevice, no structure for shifting the observing means is needed, andthus, the accuracy of the observation can be increased.

[0055] Preferably, the angle of the change in sweeping direction isabout 90° C. on the normal of the surface of the object.

[0056] Thus, the liquid discharge head can be swept in two directionsperpendicular to each other, with respect to the object. Consequently,striped unevenness of the material resulting from the sweeping directionwith respect to the object can be reduced effectively.

[0057] The liquid material may be a liquid filter material capable offorming filter elements on the object, or a liquid luminescent materialcapable of forming EL films on the object. Thus, a color filter or ELelements included in a display device can enhance the quality ofdisplayed color images.

[0058] According to another aspect, the present invention provides amethod for manufacturing a color filter in which filter elements areformed by discharging a liquid material onto an object. The methodcomprises: a first discharge step of continuously discharging dropletsof the liquid material onto the object, in a first sweeping direction;and a second discharge step of continuously discharging droplets of theliquid material onto the object, in a second sweeping direction.

[0059] When filter elements of a color filter is formed by dischargingdroplets of a liquid material, by performing sweeping in two directionsof the first sweeping direction and the second sweeping direction,striped unevenness of color shading resulting from the sweepingdirection can be reduced.

[0060] Preferably, in the first discharge step, first filter elementshaving a first color are formed in a first region of the object, and, inthe second discharge step, second filter elements having a second colordifferent from the first color are formed in a second region of theobject, different from the first region.

[0061] By forming filter elements of different colors in differentsweeping direction from one another, the manners of color shadings canbe varied from one color to another. Thus, the resulting color shadingis reduced on the whole.

[0062] Preferably, the filter elements comprises three types of filterelements having three colors, and one type of the filter elements,having one color exhibiting the strongest color shading resulting fromthe sweeping direction of droplets of a liquid material is discharged inone of the discharge steps and the other types having the other twocolors are discharged in the other discharge step.

[0063] The sweeping direction of one type of the filter elements, havingone color exhibiting the strongest color shading and the sweepingdirection of the other types having the other two colors are differentfrom each other. The difference between color shadings resulting fromthe difference between the sweeping directions easily cancels eachother. Thus, color shading can be further reduced on the whole.

[0064] Preferably, the filter elements are formed with both the dropletsdischarged in the first discharge step and the droplets discharged inthe second discharge step.

[0065] Since the filter elements are formed with a plurality of dropletsdischarged in different sweeping directions, variation of the amount ofthe discharged filter element material, resulting from the sweepingdirection can be reduced. Thus, striped color shading resulting from thesweeping direction can be reduced.

[0066] Preferably, the first sweeping direction and the second sweepingdirection form an angle of about 90° on the normal of the surface of theobject.

[0067] Thus, the liquid discharge head can be swept in two directionsperpendicular to each other, with respect to the object to dischargedroplets. Consequently, striped unevenness of the material resultingfrom the sweeping direction with respect to the object can be reducedmost effectively.

[0068] According to another aspect, the present invention provides adisplay device comprising a color filter having filter elements formedby discharging a liquid material onto an object. The color filterincludes droplets of the liquid material which are continuouslydischarged in a plurality of sweeping directions.

[0069] The display device has a color filter formed with droplets of theliquid material which are continuously discharged in a plurality ofsweeping directions. Specifically, the color filter is formed by mixingthe droplets continuously discharged along one sweeping direction andthe droplets continuously discharged along a different sweepingdirection. Therefore, striped color shading resulting from the sweepingdirection can be reduced, and the resulting display device can thusdisplay a high quality images.

[0070] Preferably, the filter elements comprise a plurality of types offiler elements having different colors from one another. The types offilter elements are formed by continuously discharging droplets of theliquid material in sweeping directions different from one another.

[0071] Since the filter elements include a plurality of types of filerelements having different colors from one another and which are formedby continuously discharging droplets of the liquid material in sweepingdirections different from one another, striped color shading resultingfrom the sweeping direction in which droplets are continuouslydischarged can be reduced.

[0072] Preferably, the filter elements comprise three types of filterelements having three colors, and one type of the filter elements havingone color exhibiting the strongest color shading resulting from thesweeping direction is discharged in a sweeping direction different fromthe sweeping direction in which the other types, having the other twocolors, are discharged.

[0073] Since the strongest color shading of one color mixed with theother color shadings, of the other two colors, color shading can befurther reduced on the whole.

[0074] Preferably, the filter elements are formed by mixing droplets ofthe liquid material which are continuously discharged in differentsweeping directions.

[0075] Since the filter elements are formed with a plurality of dropletsdischarged in different sweeping directions, variation of the amount ofthe discharged filter element material, resulting from the sweepingdirection can be reduced. Thus, striped color shading resulting from thesweeping direction can be reduced.

[0076] Preferably, the different sweeping directions form an angle ofabout 90° on the normal of the surface of the color filter.

[0077] Thus, the color filter is formed by discharging droplets withsweeping in two directions perpendicular to each other. Consequently,striped unevenness of the material resulting from the sweeping directionof droplets can be reduced most effectively.

[0078] The display device of the present invention may be anelectro-optic device in which an electro-optic material serves todisplay images. The electro-optic device may include a liquid crystalpanel laid and the color filter laid one upon the other, or an EL layerand the color filter laid one upon the other.

[0079] According to another aspect, the present invention provides anelectronic apparatus comprising a display device having any one of thecolor filters described above. The electronic apparatus of the presentinvention is not particularly limited, but is may be a personal digitalassistant such as a cellular telephone, a mobile computer, or a portableelectronic apparatus such as an electronic wrist watch.

[0080] According to another aspect, the present invention provides amethod for manufacturing a display device, comprising: a first dischargestep of continuously discharging droplets of a liquid material onto ansubstrate, in a first sweeping direction; and a second discharge step ofcontinuously discharging droplets of the liquid material onto thesubstrate, in a second sweeping direction different from the firstsweeping direction for depositing a film.

[0081] By discharging droplets onto the substrate to form a film withsweeping in two different directions, striped unevenness of the materialresulting from the sweeping direction during discharge can be reduced.In particular, this is effective for a method for manufacturing anelectronic apparatus.

[0082] Preferably, discharged droplets of the liquid material formdisplay dots.

[0083] Thus, unevenness of the material in display dots resulting fromthe sweeping direction can be reduced and, consequently, unevenness ofdisplayed images can be reduced. Thus, high-quality images can beachieved.

[0084] Preferably, each of the display dots is formed of a plurality ofdroplets of the liquid material, and some of the plurality of dropletsare discharged in the first discharge step and the other droplets aredischarged in the second discharge step.

[0085] Since each display dot is formed of a plurality of dropletsdischarged in different sweeping directions, unevenness of the materialcan be further reduced, and consequently, the quality of displayedimages can be enhanced.

[0086] The display dots may have an EL layer. In this instance,preferably, the EL layer is formed by discharged droplets of a liquidmaterial described above. The display dots may include an EL layer, ahole transport layer, and a pair of electrodes separated by theselayers. In this instance, at least one of the EL layer, the holetransport layer, and the pair of electrodes may be formed by dischargeddroplets of a material described above.

[0087] Preferably, the first sweeping direction and the second sweepingdirection form an angle of about 90° on the normal of the surface of thesubstrate.

[0088] By discharging droplets with sweeping in two directionsperpendicular to each other, unevenness of the material can be reducedon the whole effectively.

[0089] According to another aspect, the present invention provides adisplay device comprising display dots discharging droplets of a liquidmaterial onto a substrate for depositing a film. Preferably, the displaydots each include droplets of the liquid material which are continuouslydischarged in a plurality of sweeping directions.

[0090] By discharging droplets onto the substrate to form display dotswith sweeping in two different directions for depositing a film, stripedunevenness of the material resulting from the sweeping direction duringdischarge can be reduced, and consequently, the quality of the displayedimages can be enhanced. In particular, the present invention iseffective for electronic apparatuses such as liquid crystal devices andEL devices.

[0091] Preferably, the display dots are formed by mixing droplets of theliquid material which are continuously discharged in different sweepingdirections.

[0092] Since the display dots are formed with a plurality of dropletsdischarged in different sweeping directions, variation of the amount ofthe discharged material, resulting from the sweeping direction can bereduced. Thus, striped unevenness of displayed images resulting from thesweeping direction can be further reduced.

[0093] The display dots may have an EL layer. In this instance,preferably, the EL layer is formed by discharge described above. Thedisplay dots may include an EL layer, a hole transport layer, and a pairof electrodes separated by these layers. In this instance, at least oneof the EL layer, the hole transport layer, and the pair of electrodesmay be formed by discharged droplets described above.

[0094] Preferably, the different sweeping directions form an angle ofabout 90° on the normal of the surface of the color filter.

[0095] Thus, the display dots are formed by discharging droplets withsweeping in two directions perpendicular to each other. Consequently,striped unevenness of the material resulting from the sweeping directionof droplets can be reduced most effectively.

[0096] According to another aspect, the present invention provides anelectronic apparatus comprising any one of the display devices describedabove. The electronic apparatus of the present invention is notparticularly limited, but may be a personal digital assistant such as acellular telephone, a mobile computer, or a portable electronicapparatus such as an electronic wrist watch.

DESCRIPTION OF THE EMBODIMENTS

[0097] Embodiments of a method for forming a film, a film formingdevice, a liquid discharge device, a method for manufacturing a colorfilter, a display device including a color filter, a method formanufacturing a display device, a display device, and an electronicapparatus will now be described in detail with reference to drawings.

[0098] [Device for Discharging Liquid]

[0099] First, embodiments of a film forming device and a liquiddischarge device will be described. As shown in FIG. 8, a liquiddischarge device 16 has a head unit 26 including a liquid discharge head22 serving as liquid discharge means, which may be an ink jet head usedfor a printer. The liquid discharge device 16 also has a head positioncontroller 17 for controlling the position of the liquid discharge head22, a substrate position controller 18 for controlling the position of amother substrate 12, a sweeping driver 19 serving as sweeping operationdriving means for sweeping the liquid discharge head 22 over the mothersubstrate 12 in a sweeping direction X, a shifting driver 21 forshifting the liquid discharge head 22 in a shifting direction Yintersecting (perpendicular to) the sweeping direction with respect tothe mother substrate 12, a mother substrate feeding device 23 forfeeding the mother substrate 12 to a predetermined position in theliquid discharge device 16, and a control apparatus 24 for generallycontrolling the liquid discharge device 16.

[0100] The head position controller 17, the substrate positioncontroller 18, the sweeping driver 19, and the shifting driver 21 aredisposed above a base 9. These devices may be provided with a cover 14over them, if necessary. The head position controller 17, the sweepingdriver 19, and the shifting driver 21 constitute shifting means.

[0101] The liquid discharge head 22 has a nozzle line 28 comprising aplurality of nozzles 27, as shown, for example, in FIG. 10. The numberof nozzles 27 is, for example, 180, and the diameter of the nozzles 27is, for example, 28 μm. The pitch t between the nozzles 27 is, forexample, 141 μm. The width direction M shown in FIG. 10 designates astandard direction in which the liquid discharge head sweeps, and thealigning direction T designates a direction in which the nozzles 27 inthe nozzle line 28 align.

[0102] The liquid discharge head 22 has a nozzle plate 29 formed ofstainless steel or the like, a diaphragm 31 opposing the nozzle plate29, and a plurality of partition members 32 joining the nozzle plate 29to the diaphragm 31, for example, as shown in FIG. 12(a) and FIG. 12(b).The partition members 32 define a plurality of ink chambers 33 and aliquid pool 34 between the nozzle plate 29 and the diaphragm 31. The inkchambers 33 communicate with the liquid pool 34 through passages 38.

[0103] The diaphragm 31 is provided with an ink supply port 36 in aproper position thereof. The ink supply port 36 is connected to an inksupply device 37. The ink supply device 37 supplies a filter elementmaterial M for one of R, G, and B colors, which may be an R-color filterelement material, to the ink supply port 36. The supplied filter elementmaterial M fills the liquid pool 34 and then flows through the passages38 to fill the ink chambers 33.

[0104] The nozzle plate 29 has nozzles 27 for jetting the filter elementmaterial M from the ink chambers 33. Ink pressurizers 39 are disposed,corresponding to the ink chambers 33, on the back surface of thediaphragm 31 opposite the surface opposing the ink chambers 33. The inkpressurizers 39 each have a piezoelectric element 41 and a pair ofelectrodes 42 a and 42 b separated by the piezoelectric element 41, asshown in FIG. 12(b). The piezoelectric element 41 is bent in theexternal direction designated by the arrow C by energization so that thevolume of the corresponding ink chamber 33 increases. Accordingly, thefilter element material M flows in an amount equivalent to the increasedvolume from the liquid pool 34 into the ink chamber 33 through thepassage 38.

[0105] When current is removed from the piezoelectric element 41, thepiezoelectric element 41 and the diaphragm 31 return to their originalshapes. Since the ink chamber 33 also returns to its original shape, thepressure of the filter element material M in the ink chamber 33increases to jet a droplet 8 of the filter element material M from thenozzle 27. In this instance, ink-repellent films 43 formed of, forexample, Ni-tetrafluoroethylene eutectoid by plating are provided in theregions surrounding the nozzles 27 for preventing droplets 8 from beingdischarged in a wrong direction and from clogging the nozzles 27.

[0106] The head position controller 17, the substrate positioncontroller 18, the sweeping driver 19, and the shifting driver 21, andother means disposed around the above-described liquid discharge head 22will now be described with reference to FIG. 9. The head positioncontroller 17 includes an α motor 44 for horizontally rotating theliquid discharge head 22 incorporated in the head unit 26, a β motor 46for rotating the liquid discharge head 22 with reciprocation on an axisparallel to the shifting direction Y, a γ motor 47 for rotating theliquid discharge head 22 with reciprocation on an axis parallel to thesweeping direction X, and a z motor 48 for moving the liquid dischargehead 22 in the vertical direction.

[0107] The substrate position controller 18 includes a table 49 on whichthe mother substrate 12 is placed and a θ motor 51 for horizontallyrotating the table 49. The sweeping driver 19 has an X guide rail 52extending in the sweeping direction X and an X slider 53 containing, forexample, a pulse-driven linear motor. The X slider 53 moves in thesweeping direction X along the X guide rail 52 by, for example,activating the linear motor contained therein.

[0108] The shifting driver 19 has a Y guide rail 54 extending in theshifting direction Y and a Y slider 56 containing, for example, apulse-driven linear motor. The Y slider 56 moves in the shiftingdirection Y along the Y guide rail 54 by, for example, activating thelinear motor contained therein.

[0109] The linear motors contained in the X and Y sliders 53 and 56 canprecisely control rotation angles of the output shafts by pulse signalsapplied thereto. Consequently, the position of the liquid discharge head22, which is supported by the X slider 53, in the sweeping direction Xand the position of the table 49 in the shifting direction Y can becontrolled with high accuracy. The positions of the liquid dischargehead 22 and the table 49 may be controlled by feedback with a servomotoror other desired methods, and the control of the positions is notlimited to that by the pulse motor.

[0110] The table 49 is provided with positioning pins 50 a and 50 bthereon for controlling the horizontal position of the mother substrate12. The mother substrate 12 is positioned by the substrate feedingdevice 23, which will be described later, such that end faces thereof inthe sweeping direction X and the shifting direction Y are pressed to thepositioning pins 50 a and 50 b. Preferably, the table 49 has knownfixing means for fixing the positioned mother substrate 12 by, forexample, air aspiration (vacuum drawing).

[0111] The liquid discharge device 16 of the present embodiment isprovided with a plurality of pairs (two pairs in the drawing) of imagingdevices 91R and 91L and 92R and 92L above the table 49, as shown in FIG.9. The drawing illustrates only the barrels of the imaging devices 91Rand 91L and 92R and 92L, and the other parts and the structure ofsupporting the imaging devices are omitted. The imaging devices used forobservation may be CCD cameras. FIG. 8 does not show the imagingdevices.

[0112] The structure of the imaging devices 91R and 91L and 92R and 92Lwill now be illustrated in detail. FIGS. 22(a) and 22(b) are plan viewsof the mother substrate 12 positioned on and supported by the table 49.The mother substrate 12 may be supported on the table 49 such that thelongitudinal direction L thereof is parallel to the sweeping direction Xwhen viewed from above, as shown in FIG. 22(a), or such that thelongitudinal direction L is parallel to the shifting direction Y, asshown in FIG. 22(b). The positioning pins 50 a, here in the drawing, canmove in the horizontal direction of the drawing according to thehorizontal position of the mother substrate 12 and the positioning pins50 b are fixed on the table 49. However, both the positioning pins 50 aand 50 b may be fixed on the table 49, as in the positioning pins 50 b,or movable, as in the positioning pins 50 a.

[0113] The mother substrate 12 is previously provided with two pairs,and a total of four, of alignment marks 12 ar and 12 al and 12 br and 12bl in the outer region thereof. The alignment marks 12 ar and 12 al areprovided at both sides of the mother substrate 12 in the longitudinaldirection L, respectively. The alignment marks 12 br and 12 bl areprovided at both sides of the mother substrate 12 in the width-extendingdirection, that is, in the width direction M, respectively. When themother substrate 12 is supported on the table 49 such that thelongitudinal direction L thereof is parallel to the sweeping directionX, as shown in FIG. 22(a), the imaging devices 91R and 91L shoot thealignment marks 12 ar and 12 al, respectively. When the mother substrate12 is supported on the table 49 such that the longitudinal direction Lthereof is parallel to the shifting direction Y, as shown in FIG. 22(b),the imaging devices 92R and 92L shoot the alignment marks 12 br and 12bl, respectively.

[0114] The imaging devices 91R and 91L and 92R and 92L are each directlyor indirectly fixed to a fixing portion (for example, the base 9) of theliquid discharge device 16. Thus, the position of the mother substrate12 on the table 49 are accurately detected by observing the mothersubstrate 12 with the fixed imaging devices.

[0115] Returning to FIG. 8, description will be continued. The mothersubstrate feeding device 23 shown in FIG. 8 includes a mother substrateholder 57 for accommodating mother substrates 12 and a mother substratecarrier 58 for carrying the mother substrates 12, such as a robot. Themother substrate carrier 58 includes a base 59, an up-and-down shaft 61rising and lowering with respect to the base 59, a first arm 62 rotatingon the up-and-down shaft 61, a second arm 63 rotating on the basis ofthe movement of the first arm 62, and a sucking pad 64 provided on theundersurface of the end of the second arm 63. The sucking pad 64 isintended to hold the mother substrate 12 by air aspiration (vacuumdrawing) or the like.

[0116] A capping device 76 and a cleaning device 77 are disposed at oneside of the shifting driver 21 and under the sweeping locus of theliquid discharge head 22, as shown in FIG. 8. Furthermore, an electronicbalance 78 is disposed at the other side of the shifting driver 21. Thecapping device 76 is intended to prevent the nozzles 27 (see FIG. 10)from drying while the liquid discharge head 22 is in standby. Thecleaning device 77 is intended to clean the liquid discharge head 22.The electronic balance 78 is intended to weigh the ink droplet 8discharged from each nozzle 27. Also, a head camera 81 shifting togetherwith the liquid discharge head 22 is attached in the vicinity of theliquid discharge head 22.

[0117] The control apparatus 24 shown in FIG. 8 includes a computer mainbody 66 containing a processor, an input device 67, such as a keyboard,and a display device 68, such as a CRT. The computer main body 66includes a CPU (central processing unit) 69 shown in FIG. 14 and aninformation-recording medium 71 serving as a memory for storing varioustypes of information.

[0118] The head position controller 17, the substrate positioncontroller 18, the sweeping driver 19, the shifting driver 21, and ahead driving circuit 72 for driving the piezoelectric elements 41 (seeFIG. 12(b)) in the liquid discharge head 22 are connected to the CPU 69through an input-output interface 73 and a bus 74, as shown in FIG. 14.The substrate feeding device 23, the input device 67, the display device68, the capping device 76, the cleaning device 77, and the electronicbalance 78 are also connected to the CPU 69 through the input-outputinterface 73 and the bus 74, as in above.

[0119] Memories, such as the information-recording medium 71, generallyinclude semiconductor memories, such as a RAM (random access memory) anda ROM (read only memory), and external storages, such as a hard disk, aCD-ROM reading device, and a disk-shaped recording medium. Theinformation-recording medium 71 has: memory areas for storing softwarein which procedures for controlling the liquid discharge device 16 areprogrammed, coordinate data defining positions in the mother substrate12 to which the liquid discharge head 22 discharges ink, and thedistance at which the mother substrate 12 is shifted in the shiftingdirection Y in FIG. 9; areas for functioning as a working area of theCPU 69, temporary files, and the like; and other various memory areas.

[0120] The CPU 69 functions as a control to discharge ink inpredetermined positions on the surface of the mother substrate 12,according to the software stored in the memory, or the informationrecording medium 71. As for portions for embodying concrete functions,the CPU 69 has a cleaning operation part for performing arithmeticcomputation for cleaning, a capping operation part for performingcapping operation, a weighing operation part for performing arithmeticcomputation for measuring weight with the electronic balance 78, and adrawing operation part for drawing a predetermined pattern bydischarging ink droplets onto the surface of the mother substrate 12, asshown in FIG. 14.

[0121] The drawing operation part has various controlling operationparts for performing arithmetic computations such as a drawing initialposition operating part for locating the liquid discharge head 22 at aninitial position, a sweeping control operation part for sweeping theliquid discharge head 22 in the sweeping direction X at a predeterminedspeed, a shifting operation part for shifting the mother substrate 12 apredetermined distance in the shifting direction Y, and a nozzledischarge control operation part for determining which of the pluralityof nozzles 27 of the liquid discharge head 22 discharges ink.

[0122] The above-described control functions are embodied by softwareused with the CPU 69, in the embodiment. However, these functions may beembodied by an electronic circuit, but not CPUs, if such an electroniccircuit is applicable.

[0123] Turning now to the flow chart shown in FIG. 15, the operation ofthe liquid discharge device 16 structured as described above will beillustrated. When an operator turns on the liquid discharge device 16,initialization is performed in step S1. Specifically, the head unit 26,the substrate feeding device 23, control apparatus 24, and other devicesare restored to the initial settings.

[0124] When weighing timing comes (step S2), the sweeping driver 19moves the head unit 26 shown in FIG. 9 to the position of the electronicbalance 78 shown in FIG. 8 (step S3). The electronic balance 78 weighsthe ink droplet discharged from the nozzles 27 (step S4). Voltageapplied to the piezoelectric elements 41 of the nozzles 27 is adjustedaccording to the ink-discharge performance of the nozzles 27 evaluatedby the weigh (step S5).

[0125] When cleaning timing comes (step S6), the sweeping driver 19moves the head unit 26 to the cleaning device 77 (step S7). The cleaningdevice 77 cleans the liquid discharge head 22 (step S8).

[0126] Before weighing timing and cleaning timing come, or afterweighing and cleaning are completed, the substrate feeding device 23shown in FIG. 8 is activated to feed the mother substrate 12 to thetable 49 in step S9. Specifically, the sucking pad 64 draws one of themother substrates 12 in the mother substrate holder 57 to hold it up.The up-and-down shaft 61, the first arm 62, and the second arm 63 aremoved to carry the mother substrate 12 to the table 49 and, then, pressthe mother substrate 12 to the pins 50 a and 50 b (see FIG. 9)previously provided in proper places on the table 49. In order toprevent displacement of the mother substrate 12, it is preferable to fixthe mother substrate 12 to the table 49 by means of air aspiration(vacuum drawing) or the like.

[0127] Then, while the imaging devices 91R and 91L, shown in FIG. 9,observe the mother substrate 12, the table 49 is horizontally rotated toposition the mother substrate 12 by rotating the output shaft of the θmotor 51 in small angles (step S10). More specifically, the pairs ofimaging devices 91R and 91L and 92R and 92L shoot the alignment marks 12ar and 12 al and 12 br and 12 bl provided at the sides of the mothersubstrate 12. The horizontal posture of the mother substrate 12 iscalculated from the positions where the alignment marks are shot. Therotation angle θ is adjusted by rotating the table 49 according to thehorizontal posture of the mother substrate 12.

[0128] Then, while the head camera 81 shown in FIG. 8 observes themother substrate 12, the position where the liquid discharge head 22starts drawing is determined by calculation (step S11). The liquiddischarge head 22 is shifted to the starting position of drawing byappropriately operating the sweeping driver 19 and the shifting driver21 (step S12).

[0129] In this instance, the standard direction S shown in FIG. 10 ofthe liquid discharge head 22 is not necessarily parallel to the sweepingdirection X, and it may form an angle φ1 or φ2 with respect to thesweeping direction X, as shown in FIGS. 1 and 2. These angles φ1 and φ2are intended to geometrically equalize the pitch of the nozzles 27arranged in the T direction to the pitch of droplets landing on themother substrate 12 in the shifting direction Y because the pitch of theink droplets to be discharged onto the surface of the mother substrate12 is often different from the pitch of the nozzles 27.

[0130] When the liquid discharge head 22 is placed in the startingposition of drawing in step S12 shown in FIG. 15, the liquid dischargehead 22 is linearly moved to sweep in the sweeping direction X at aconstant speed in step S13. The liquid discharge head 22 continuouslydischarges ink droplets from the nozzles 27 thereof onto the surface ofthe mother substrate 12 during sweeping.

[0131] The amount of an ink droplet may be set such that the entireamount of ink is discharged to an area covered by a series of sweepingoperation of the liquid discharge head 22. Alternatively, when theliquid discharge head 22 sweeps several times as described later withreference to FIGS. 3 and 4, the amount of the ink droplet may be setsuch that a fraction (for example, one fourth) of the entire amount ofink required in one series of sweeping operation is discharged. Thesweeping operation is repeated several times (for example, four times)so as to overlap parts of sweeping areas in the shifting direction Y andto cover the entire area where the ink should be discharged.

[0132] After the completion of a series of sweeping on the mothersubstrate 12 (step S14), the liquid discharge head 22 reverses theshifting direction to return to the initial position (step S15), andshifts a predetermined distance (by a shifting distance set in advance)in the shifting direction Y (step S16). The ink is then swept again anddischarged in step S13, and the above-described procedure is repeated tosweep over a plurality of lines. After the completion of a series ofsweeping, the liquid discharge head 22 may be driven so as to shift apredetermined distance in the shifting direction Y and, then, turn tosweep in the opposite direction, as described later with reference toFIG. 2.

[0133] In the case of forming a plurality of color filters in the mothersubstrate 12, as described later, the liquid discharge head 22 shifts apredetermined distance in the shifting direction Y after the completionof ink discharge to the entirety of a line over the color filter regionson the mother substrate 12 (step S17), and repeats steps S13 to S16.After ink discharge is completed to all lines in the color filter regionon the mother substrate 12 (step S18), the substrate feeding device 23or another transport means carries the treated mother substrate 12 tothe outside in step S20. Then, the feed of the mother substrate 12 andthe discharge of ink are repeated as in above until an operator give adirection to terminate the procedure.

[0134] When the operator directs the CPU 69 to terminate the procedure(step S21), the liquid discharge head 22 is carried to the cappingdevice 76. The capping device 76 caps the liquid discharge head 22 (stepS22).

[0135] In the liquid discharge device 16 structured as in above, ink canland on the entire surface of the mother substrate 12 by continuouslydischarging ink droplets while the liquid discharge head 22 sweeps inthe sweeping direction X and by shifting the sweeping operation in theshifting direction Y and then repeating the sweeping operation. In thepresent embodiment, the mother substrate 12 on the table 49 can bepositioned using the imaging devices 91R and 91L which shoot thealignment marks 12 ar and 12 al, as shown in FIG. 22(a). At the sametime, the mother substrate 12 put on the table 49 in a differenthorizontal posture (the posture in which the mother substrate 12 isrotated 90° on the normal thereof) can be positioned using the imagingdevices 92R and 92L which shoot the alignment marks 12 br and 12 bl, asshown in FIG. 22(b). Therefore, two different sweeping directions X(perpendicular to each other) can be set with respect to the mothersubstrate 12.

[0136] It is generally assumed that mother substrates 12 having variousink-landing-position arrangements are fed to the liquid discharge device16. For example, when a plurality of unit regions 11 are arrayed on themother substrate 12, as shown in FIG. 22, the size of the unit regions11 or the dot array pattern may be varied between product models, or thearrangement manner of the unit regions 11 may be varied in order toincrease productivity by increasing the number of unit regions 11 asmany as possible. Accordingly, in the case of the mother substrate 12 inwhich the unit regions 11 are arranged as shown in FIG. 22, it issuitable for efficiently treating the mother substrate 12 to allow thelongitudinal direction L of the mother substrate 12 to be parallel tothe sweeping direction X of the liquid discharge head 22, as shown inFIG. 22(a). On the other hand, in the case of another mother substrate12′ in which different types of unit regions 11′ are arranged as shownin FIG. 23 or in which the unit regions 11 are arranged in a mannerdifferent from the manner shown in FIG. 22, it may be suitable forefficiently treating the mother substrate 12′ to allow the longitudinaldirection L of the mother substrate 12′ to be parallel to the shiftingdirection Y, as shown in FIG. 23(a).

[0137] Since the liquid discharge device 16 can treat the mothersubstrate 12 regardless of the horizontal posture in which the mothersubstrate 12 is placed in either of the two different directions asshown in FIGS. 22 and 23 (perpendicular to each other in the drawings),the mother substrate 12 can be placed on the table 49 in a horizontalposture according to the ink-landing-position arrangement. As a result,the liquid discharge device 16 can efficiently treat a discharge object,or the mother substrate 12, according to the posture of the object.

[0138] In the present embodiment, the substrate feeding device 23 isused for placing the mother substrate 12 on the table 49. In order toplace the mother substrate 12 so as to orient in either direction of thetwo different directions as shown in FIGS. 22 and 23, the feedingposture of the substrate feeding device 23 may be changed.Alternatively, a mechanism for rotating the table 49 may be used torotate it, for example, 90°, and whether the horizontal orientation ofthe mother substrate 12 is changed is selected after the mothersubstrate 12 is placed on the table 49.

[0139] It has been described in association with FIG. 56 that the amountof ink droplets discharged from the nozzles 27 constituting the nozzleline 28 of the liquid discharge head 22 is liable to vary, and, forexample, that some nozzles 27 at both ends of the nozzle line 28 (forexample, 10 nozzles at each end) particularly discharge a large amountof ink. It is not preferable to use the nozzles 27 discharging ink in anamount larger than that of the other nozzles 27 because it results infilms having nonuniform thicknesses. It is preferable to set some, forexample, ten nozzles or so, of the nozzles 27 constituting the nozzleline 28, at both ends E of the nozzle line 28 so as not to discharge inkand to use the other nozzles in the other region F, as shown in FIG. 13.

[0140] Also, in order to reduce the nonuniformity of film thickness,each film is formed of a plurality of droplets from the liquid dischargehead 22, but not only one droplet, in a predetermined region.Specifically, in the case of depositing films in a plurality of regions,even if with a certain variety in the amount of each of droplets byforming the films of a plurality of droplets, the nonuniformity of thefilm thickness in each region can be reduced.

[0141] The structure of the liquid discharge head 22 is not limited tothe one described above, but various structures may be applied. ForExample, a liquid discharge head 22A shown in FIG. 11 has two nozzlelines 28 disposed in the standard direction S. Each of these nozzlelines 28 includes a plurality of nozzles 27, as in above. Another liquiddischarge head 22B shown in FIG. 16 has three nozzle lines 28R, 28G, and28B disposed in the standard direction S. In each of the liquiddischarge heads 22A and 22B, the liquid material discharged from thenozzles 27 in the nozzle lines 28 may be the same or different betweenthe lines. For example, in the liquid discharge head 22A shown in FIG.11, the nozzles 27 in both nozzle lines 28 discharge the same ink. Inthe liquid discharge head 22B shown in FIG. 16, the material of inkdischarged from the nozzles 27 is different between the nozzle lines28R, 28G, and 28B such that, for example, filter element materials 13R,13G, and 13B are discharged, as described later.

[0142] [Color Filter and Method for Manufacturing the Same]

[0143] An embodiment of a method for manufacturing a color filter willnow be described. This embodiment illustrates a method in which theabove-described liquid discharge device 16 is used for forming the colorfilter, but the method is not limited by the device used.

[0144]FIG. 5(a) schematically shows the plan structure of an exemplarycolor filter. FIG. 6(d) shows the structure in a sectional view takenalong line VI-VI of FIG. 5(a).

[0145] The color filter 1 of the present embodiment includes a substrate(base material) 2 formed of glass, resin, or the like and a plurality offilter elements 3 deposited on the surface of the substrate 2, in a dotpattern, which may be a dot matrix as shown in the drawing. The colorfilter 1 also includes a protective layer 4 deposited on the filterelements 3, as shown in FIG. 6(d). FIG. 5(a) shows the color filter 1without the protective layer 4 in plan view.

[0146] Barrier walls 6 are formed of a light-shielding resin in a gridpattern on the substrate 2. The regions partitioned by the barrier walls6 are filled with a color material to form filter elements 3. The filterelements 3 are each formed of one of the color materials of R (red), G(green), and B (blue), and the resulting filter elements 3 each havingone of the colors are arrayed in a predetermined arrangement. Exemplaryarrangements include striped arrangement (in which all the filterelements in a column in the matrix have the same color) shown in FIG.7(a), mosaic arrangement (in which any series of three filter elements 3aligned in a column or a row includes R, G, and B colors) shown in FIG.7(b), and delta arrangement (in which the filter elements 3 are arrayedso as to be staggered one another and any unit consisting of threeadjacent filter elements includes R, G, and B colors) shown in FIG.7(c). The “barrier walls” in the present invention include “banks”,referring to protrusions from the substrate, and the side faces thereofmay be substantially perpendicular to the substrate or sloped.

[0147] The color filter 1 has a size of, for example, about 4.57 cm (1.8inches). The filter elements 3 each have dimensions of 30 μm×100 μm. Theinterval between adjacent filter elements 3, that is, the filter elementpitch, is, for example, 75 μm.

[0148] When the color filter 1 of the present invention is used as anoptical element for displaying color images (full color images), threefilter elements of R, G, and B colors constitute a unit acting as apixel. Color images are displayed by selectively passing light throughone of the R, G, and B filter elements in a pixel or a combination ofthe filter elements. In this instance, the barrier walls 6 formed of alight-shielding resin serve as a black matrix.

[0149] The color filter 1 is cut off from the substrate, that is, themother substrate 12 having a large area as shown in FIG. 5(b).Specifically, a color filter pattern is formed in each of a plurality ofcolor-filter-forming regions (unit regions) 11 defined in the mothersubstrate 12. Grooves for cutting into pieces are formed in thesurroundings of the color-filter-forming regions 11. The mothersubstrate 12 is divided (cut) into pieces to form the color filters 1,one of which is shown in FIG. 5(a), by applying a stress to the groovesor other methods.

[0150] A method for manufacturing the color filter 1 will now bedescribed in detail. FIG. 6 schematically shows a procedure ofmanufacturing the color filter 1 step by step. First, the barrier walls6 are formed of a light-shielding resin in a grid pattern viewed in thedirection of arrow B, on the mother substrate 12. The hollows 7 of thegrid pattern define regions where the filter elements 3 are formed, thatis, filter-element-forming regions. The plan dimension of eachfilter-element-region 7 separated by the barrier walls 6 is, forexample, 30 μm×100 μm, when viewed in the direction of arrow B.

[0151] The barrier walls 6 serve to stop the flow of a liquid filterelement material 13 and as a black matrix. Also, the barrier walls 6 areformed by an arbitrary patterning technique, such as photolithography,and may further be heated with a heater if necessary.

[0152] After the formation of the barrier walls 6, the droplets 8 of thefilter element material 13 are supplied to the filter-element-formingregions 7 as shown in FIG. 6(b). Thus, the filter-element-regions 7 arefilled with the filter element material 13. This process is performedby, for example, discharging the droplets 8 of the ink (filter elementmaterial 13) from the liquid discharge head 22 of the above-describedliquid discharge device 16 to deposit the droplets 8 in thefilter-element-forming regions 7. Reference numerals 13R, 13G, and 13Bin FIG. 6(b) represent filter element materials having R (red), G(green), and B (blue) colors, respectively.

[0153] After a predetermined amount of the filter element material 13fills the filter-element-forming regions 7, the mother substrate 12 isheated to, for example, about 70° C. by a heater to vaporize the solventof the filter element material 13. This vaporization reduces the volumeof the filter element material 13 and, thus, the filter element material13 become flattened, as shown in FIG. 6(c). If the volume is excessivelyreduced, the supply of the droplets 8 of the color filter material 13and the heating of the droplets 8 are repeated until the thickness offilter element material reaches a level satisfactory for the resultingcolor filter 1. Only the remaining solid constituents of the colorfilter material 13 result in a film, thus forming the color filterelements 3, each having a desired color.

[0154] After the filter elements 3 are formed as above, the color filterelements 3 are subjected to heat treatment at a predeterminedtemperature for a predetermined time to be completely dried. Then, theprotective layer 4 is deposited by a proper method, such as spincoating, roll coating, dipping, or ink jetting. The protective layer 4is intended to protect the filter elements 3 and flatten the surface ofthe color filter 1. In the embodiment, the barrier walls 6 are formed ofa light-shielding resin to serve to block light (as a black matrix).Alternatively, instead of using a light-transmissive resin, barrierwalls 6 may be covered with a light-shielding layer formed of a metal,such as Cr, having a size larger than that of the barrier wallsthereunder.

[0155] In the present embodiment, as shown in FIG. 6(b), the filterelement material 13 is used as ink discharged from the above-describedliquid discharge device 16, and the droplets 8 of the ink are depositedin the filter-element-forming regions 7 to from the filter element 3. Inthis instance, if the three types of filter element material 13R, 13G,and 13 b are discharged together while the liquid discharge head 22 isswept in an identical sweeping direction X with respect to the mothersubstrate 12, unevenness occurs in a striped manner in the sweepingdirection X due to the variation of the discharge rate between thenozzles 27 of the liquid discharge head 22, as described above, andchanges of the discharge rate of the nozzles 27 with time.

[0156] In the present embodiment, accordingly, any one of the threetypes of filter element material 13R, 13G, and 13B is discharged whilethe liquid discharge head 22 is swept in a different direction from thatfor the other types of filter element materials. For example, two of theabove-described three color materials (for example, 13R and 13G) aredischarged while the liquid discharge head 22 is swept in a sweepingdirection X parallel to the longitudinal direction L of the mothersubstrate 12, as shown in FIG. 22(a); and the other color material (forexample, 13B) is discharged while the liquid discharge head 22 is sweptin a different sweeping direction X perpendicular to the longitudinaldirection L of the mother substrate 12 (that is, the shifting directionY is parallel to the longitudinal direction L of the mother substrate12), as shown in FIG. 22(b). Alternatively, two of the above-describedthree color materials (for example, 13R and 13G) may be discharged whilethe liquid discharge head 22 is swept in a sweeping direction Xperpendicular to the longitudinal direction L of the mother substrate12, (that is, the shifting direction Y is parallel to the longitudinaldirection L of the mother substrate 12) as shown in FIG. 23(a); and theother color material (for example, 13B) is discharged while the liquiddischarge head 22 is swept in a different sweeping direction X parallelto the longitudinal direction L of the mother substrate 12, as shown inFIG. 23(b).

[0157] Thus, the sweeping direction for discharge of one of the threetypes of filter element material 13R, 13G, and 13B differs from (andbecomes perpendicular to) the sweeping direction for the others, withrespect to the mother substrate 12. As a result, the striped colorshading of one color material occurs in a direction different from thatof the other color materials and, thus, the color shading of the colorfilter 1 becomes inconspicuous on the whole, effectively decreasing.

[0158] FIGS. 1 to 4 are schematic illustrations showing procedures fordischarging the above-described filter element materials 13R, 13G, and13B onto the mother substrate 12 from the nozzles 27 of the liquiddischarge head 22. FIG. 24 is a schematic illustration of the structureof a manufacturing apparatus for performing the procedures.

[0159] (Variation 1)

[0160] The apparatus for manufacturing color filters shown in FIG. 24includes first, second, and third sections 16R, 16G, and 16B, eachincluding substantially the same liquid discharge device 16. Only thefirst section 16R includes a substrate holder 57 but the second andthird sections 16G and 16B do not. Preliminary dryers 96 each having ahot plate are disposed for preliminarily drying inks (filter elementmaterials) discharged and deposited on the mother substrate 12, betweenthe first and second sections 16R and 16G, between the second and thirdsections 16G and 16B, and downstream of the third section 16B. Also, asubstrate carrier 58 for carrying the mother substrate 12 to thecorresponding section and another substrate carrier 95 for carrying themother substrate from the upstream liquid discharge device to thefollowing preliminary dryer 96 are disposed corresponding to each of thesections. Furthermore, a substrate exporter 97 is disposed for carryingthe mother substrate 12 from the preliminary dryer 96 located downstreamof the third section 16B to another substrate holder 98.

[0161] In this manufacturing apparatus, the first section 16R dischargesthe R (red) filter element material 13R onto the mother substrate 12,and subsequently the corresponding preliminary dryer 96 dries the filterelement material 13R. Then, the second section 16G discharges the G(green) filter element material 13G onto the mother substrate 12, andthe corresponding preliminary dryer 96 dries the filter element material13G. Furthermore, the third section 16B discharges the B (blue) filterelement material 13B onto the mother substrate 12, and the correspondingpreliminary dryer 96 dries the filter element material 13B. Theresulting filter elements 3R, 3G, and 3B are finally stored in thesubstrate holder 98.

[0162] (Details of Variation 1)

[0163]FIG. 1 shows a concrete example of the manufacturing processperformed to the mother substrate 12 by the above-described sections16R, 16G, and 16B of the manufacturing apparatus. In FIG. 1, theposition of the liquid discharge head 22 is illustrated as if displacedin the sweeping direction when the liquid discharge head 22 is shiftedin the shifting direction, for the sake of illustration convenience.However, this does not necessarily mean that the starting point ofsweeping is changed from one series of sweeping to another.

[0164] The filter-element-forming regions 7 are arranged in a dot matrixmanner in each color-filter-forming region (unit region) 11 of themother substrate 12. The longitudinal direction L and width direction Mof the mother substrate are set as shown in FIG. 12. One or two colormaterials (for example, 13R or 13R and 13G) of the filter elementmaterials 13R, 13G, and 13B are continuously discharged to serve as inkfrom the liquid discharge head 22 which is simultaneously swept in thelongitudinal direction L from the external position (initial position)of one end of the mother substrate 12 in the longitudinal direction L(the left end in the drawing), so that the droplets of the ink land inthe filter-element-forming regions aligning in the longitudinaldirection L. When the liquid discharge head 22 reaches the other end(the right end, but not shown, in the drawing) of the mother substrate12, it is shifted a predetermined distance in the width direction M, andsubsequently returns to the external position of the former end. Theliquid discharge head 22 again discharges droplets while being swept inthe longitudinal direction L.

[0165] On the other hand, the other two or one color material (forexample, 13G and 13B or 13B) of the filter element materials 13R, 13G,and 13B is discharged onto the mother substrate 12 while the liquiddischarge head 22 is swept in the width direction M from the externalposition of at one end of the mother substrate 12 as the initialposition of the liquid discharge head 22 in the width direction M. Whenone series of sweeping of the liquid discharge head 22 is completed, theliquid discharge head 22 is shifted a predetermined distance in thelongitudinal direction L, and is subsequently moved in the oppositedirection to return to the external position at the end in the widthdirection M of the mother substrate 12. This operation is repeated.Thus, at least one color material of the three filter element materials13R, 13G, and 13B is discharged in a sweeping direction different from(perpendicular to) the sweeping direction for the other color materials.

[0166] (Modification of Variation 1)

[0167]FIG. 2 shows another manufacturing process performed by thesections 16R, 16G, and 16B of the manufacturing apparatus, according toa modification of Variation 1. As in above, one or two color materialsof the filter element materials 13R, 13G, and 13B are discharged in ascanning direction of the liquid discharge head 22 parallel to theabove-described longitudinal direction L, and the other colormaterial(s) is discharged in a different sweeping direction of theliquid discharge head 22 parallel to the above-described width directionM.

[0168] This example is, however, different from the method shown in FIG.1 in that after one series of the sweeping in which the liquid dischargehead 22 sweeps in the longitudinal direction L or the width direction Mfrom the external position at one end of the mother substrate 12 to theother end is completed, and the shifting operation is made at theexternal position of the other end of the mother substrate 12, theliquid discharge head 22 reverses the sweeping direction (thelongitudinal direction L or width direction M) at the external positionof the other end of the mother substrate 12, thus discharging droplets.By repeating this operation, the liquid discharge head 22 can sweep onthe mother substrate 12 in two directions opposite to each other,consequently not needing returning operation. Thus, more efficientmanufacturing can be performed.

[0169] In general, the pitches of the filter-element-forming regions(unit regions) 11 of the mother substrate 12 in the longitudinaldirection L and the width direction L may be different from each other,in the embodiment shown FIGS. 1 and 2. In such a case, the angles φ1 andφ2 between the standard direction S and scanning direction X (parallelto the longitudinal direction L or width direction M in the drawings) ofthe liquid discharge head 22 may be changed between the sweepingoperation with the same liquid discharge head 22 in the longitudinaldirection L and the width direction M, as shown in FIGS. 1 and 2.

[0170] (Modification of Variation 1)

[0171]FIG. 3 is a schematic illustration showing a sweeping manner ofthe liquid discharge head 22 different from that described above. InFIG. 3, the position of the liquid discharge head 22 is illustrated asif displaced in the sweeping direction when the liquid discharge head 22is shifted in the shifting direction, for the sake of illustrationconvenience. However, this does not necessarily mean that the startingpoint of sweeping is changed from one series of sweeping to another. Inthis example, the liquid discharge head 22 discharges droplets 8 of ink(filter element material) such that N droplets 8 (4 drops in thedrawing) land in each filter-element-forming region 7 to form thecorresponding filter element 3. The amount of a droplet 8 dischargedfrom the liquid discharge head 22 and the volume of the filter elements3 are set in advance.

[0172] In this instance, when the sweeping direction X of the liquiddischarge head 22 is parallel to the width direction M, the distanceΔAS1 at which the liquid discharge head 22 is shifted during theinterval between the series of sweeping is set to be ΔS1=W1/N (W1/4 inthe drawing), with respect to the width W1 of the nozzle line 28 of theliquid discharge head 22. On the other hand, when the sweeping directionX of the liquid discharge head 22 is parallel to the longitudinaldirection L, the distance ΔSm at which the liquid discharge head 22 isshifted during the interval between the series of sweeping is set to beΔSm=Wm/N (Wm/4 in the drawing), with respect to the width Wm of thenozzle line 28 of the liquid discharge head 22. Thus, the amount of thefilter element material discharged in each filter-element-forming region7 is 1/N (1/4 in the drawing) of the entirety of a desired quantityduring a series of sweeping. However, the droplet 8 is discharged Ntimes (4 times in the drawing) in the filter-element-forming region 7and, thus, the entire quantity of the filter element material fills thefilter-element-forming region 7.

[0173] In this modification, the liquid discharge head 22 may be sweptover the mother substrate 12 to discharge droplets 8 in both directionseven in a reciprocating manner as in the case shown in FIG. 2.

[0174] (Variation 2)

[0175] In the Variation 1 described above, as shown in FIG. 24, theplurality of liquid discharge heads 16R, 16G, and 16B are used for theplurality of filter element materials 13R, 13G, and 13B, respectively,and the sweeping direction of at least one liquid discharge head (inkjet head) 22 is set different from that of the other heads by changingthe posture of the mother substrate 12 fed. However, the method of thepresent invention is not limited to the method above, but a plurality offilter element materials may be discharged one by one from only oneliquid discharge device. Specifically, the relative orientation betweenthe mother substrate 12 and the sweeping direction of the liquiddischarge head 22 is changed in one liquid discharge device, during thedischarging process. The sweeping direction of the liquid discharge headmay be changed during the discharging process to change the relativeorientation. In this case, for example, the liquid discharge head (inkjet head) 22 can sweep not only the sweeping direction X shown in FIG. 9but also in the shifting direction Y Alternatively, the horizontalorientation of the mother substrate 12 may be changed during thedischarging process to change the relative orientation. Both techniquesmay be applied in the present invention, and the latter will now beillustrated in detail with reference to FIG. 25.

[0176]FIG. 25 shows a state in which the mother substrate 12 is placedon the table 49 of the liquid discharge device 16 shown in FIGS. 8 and9. In this embodiment, the orientations of the mother substrate 12 inwhich the longitudinal direction L of the mother substrate 12 isparallel to the sweeping direction X (shown in (a) and (b) of FIG. 25)and in which the width direction M of the mother substrate 12 isparallel to the sweeping direction X (shown in (c) of FIG. 25) areswitched by rotating the table 49. Thus, the sweeping direction X of theliquid discharge head 22 is relatively rotated 90° with respect to themother substrate 12.

[0177] For example, the substrate feeding device 23 shown in FIG. 8feeds the mother substrate 12 onto the table 49, first. In thisinstance, the mother substrate 12 is placed on the table 49 such thatthe longitudinal direction L of the mother substrate 12 becomes parallelto the sweeping direction X of the liquid discharge head 22, as shown inFIG. 25(a). Then, while being swept in the sweeping direction X, theliquid discharge head 22 discharges the filter element material 13R fromthe nozzles 27 thereof. By repeating the sweeping operation and theshifting operation, as in above, all the necessaryfilter-element-forming regions 7 are filled with the filter elementmaterial 13R to form the filter elements 3R.

[0178] Next, the liquid discharge head 22 discharges another filterelement material 13G in the same posture, in the same manner as above,as shown in FIG. 25(b). By repeating the sweeping operation and theshifting operation, as in above, all the necessaryfilter-element-forming regions 7 are filled with the filter elementmaterial 13G to form the filter elements 3G.

[0179] Then, the table 49 is rotated 90°, as shown in FIG. 25(c). Thus,the mother substrate 12 on the table 49 is held in a horizontalorientation in which the width direction M thereof is parallel to thesweeping direction X of the liquid discharge head 22. Subsequently, theliquid discharge head 22 discharges the other filter element material13B as in above. By repeating the sweeping operation and the shiftingoperation, as in above, all the necessary filter-element-forming regions7 are filled with the filter element material 3B to form the filterelements 3B.

[0180] If a liquid discharge head discharging a single type of filterelement material, as in the above-described liquid discharge head 22, isused, three liquid discharge heads may be used, one by one, fordischarging the above-described three types of filter element material13R, 13G, and 13B, to perform the steps shown in (a) to (c) of FIG. 25.On the other hand, the liquid discharge head 22B shown in FIG. 16 candischarge the filter element materials 13R, 13G, and 13B supplied fromthree ink supply devices 37R, 37G, and 37B respectively, from thenozzles 27 of the three respective nozzle lines 28R, 28G, and 28B. Thesingle liquid discharge head 22B can, therefore, perform theabove-described three steps.

[0181] Any technique described in Variation 1 with reference to FIGS. 1to 3 may also be applied to Variation 2.

[0182] (Variation 3)

[0183] In the technique illustrated with reference to FIG. 3, aplurality of droplets are discharged in each filter-element-formingregion 7. In this instance, when at least one of the filter elementmaterials 13R, 13G, and 13B is discharged, some of the plurality ofdroplets for one filter-element-forming region 7 may be discharged in asweeping direction, with respect to the mother substrate 12, differentfrom the sweeping direction for the other droplets. Thus, the variationof the quantity of ink filling each filter-element-forming region 7resulting from discharging a plurality of ink droplets can be reduced.In addition, color shading resulting from the sweeping direction can bereduced.

[0184]FIG. 26 shows an exemplary process of discharging a plurality ofdroplets of an identical type of filter element material in eachfilter-element-forming region 7, as in above. For example, some (twodrops in the drawing) of N droplets 8 (4 drops in the drawing) whichshould be discharged in the filter-element-forming region 7 aredischarged while the ink jet head is sweeping over the mother substrate12 in a horizontal posture in which the longitudinal direction L thereofis parallel to the sweeping direction X, as shown in FIG. 26(a). On theother hand, the other droplets 8 (two drops in the drawing) aredischarged while the ink jet head is sweeping over the mother substrate12 in another horizontal posture in which the width direction M thereofis parallel to the sweeping direction X, as shown in FIG. 26(b)

[0185] Thus, some of the droplets 8 which should be placed in eachfilter-element-forming region 7 are discharged while the liquiddischarge head is swept in a sweeping direction different from thesweeping direction for the other droplets. As a result, nonuniformity ofthe material resulting from the sweeping direction can be reduced, andcolor shading of the filter elements 3 occurring in a striped manner canalso be reduced.

[0186] (Details of Variation 3)

[0187] A concrete example of Variation 3 will now be illustrated withreference to FIG. 4. In FIG. 4, the position of the liquid dischargehead 22 is illustrated as if displaced in the sweeping direction whenthe liquid discharge head 22 is shifted in the shifting direction, forthe sake of illustration convenience. However, this does not necessarilymean that the starting point of sweeping is changed from one series ofsweeping to another. In FIG. 26(a), the distance ΔSm at which the liquiddischarge head 22 is shifted is set to be ΔSm=Wm/I (Wm/2 in thedrawing), with respect to the width component Wm of the liquid dischargehead 22 in the width direction M. Then, the sweeping operation in thesweeping direction X (=the longitudinal direction L) and the shiftingoperation in the shifting direction Y (=the width direction M) arerepeated to discharge droplets 8. On the other hand, in FIG. 26(b), thedistance ΔS1 at which the liquid discharge head 22 is shifted is set tobe ΔS1=W1/K (W1/2 in the drawing), with respect to the width componentW1 of the liquid discharge head 22 in the longitudinal direction L.Then, the sweeping operation in the same sweeping direction X as inabove (=the width direction M) and the shifting operation in theshifting direction Y (=the longitudinal direction L) are repeated todischarge droplets 8. In this instance, the number of droplets 8 whichshould be discharged in each filter-element-forming region 7 is N (4 inthe drawing) and is expressed by the equation N=I+K.

[0188] In the above-described method for manufacturing a color filter,preferably, only a color phase of a plurality of color phasesconstituting the color filter, exhibiting the most inconspicuous stripedcolor shading resulting from the sweeping direction is formed whilesweeping is performed in a direction different from the sweepingdirection for the other color phases. As a result, the resulting colorshading is mixed with the other color shadings to reduce the degree ofstriped color shading on the whole. For example, in the case of usingthe above-described three colors R, G, and B, the blue filter elements3B most strongly exhibit striped color shading resulting from thesweeping direction. Therefore, when the blue filter elements 3B areformed, the sweeping direction of the liquid discharge head ispreferably set in a direction different from (perpendicular to) thesweeping direction when the other, R (red) and G (green), filterelements 3R and 3G are formed.

[0189] The Variations described above are not limited to themanufacturing of a color filter, but they may be applied to themanufacturing of an EL device. In addition, they may be applied tovarious methods for film deposition and structures of a film formingdevoice. In the above-described Variations, the liquid discharge head 22is repeatedly swept while being shifted in distances equivalent to thedischarge width of the liquid discharge head 22. Alternatively, theerror variance method may be employed in which the liquid discharge head22 is repeatedly swept while being shifted in distances smaller than theabove-described discharge width, in order to reduce the unevenness offilm deposition resulting from the variation of the discharge quantitybetween the plurality of nozzles of the liquid discharge head 22. Thus,the unevenness of film deposition can further be reduced.

[0190] [Display Device (Electro-Optic Device) Including a Color Filterand Method for Manufacturing the Same]

[0191]FIG. 17 shows a method for manufacturing a liquid crystal deviceaccording to an embodiment of a method for manufacturing a displaydevice (electro-optic device) of the present invention. Also, FIG. 18shows a liquid crystal device, by way of example of a display device(electro-optic device) manufactured by the method. Furthermore, FIG. 19is a cross sectional view of the liquid crystal device taken along lineIX-IX in FIG. 18. First, the exemplary structure of the liquid crystaldevice will be described with reference to FIGS. 18 and 19. The liquidcrystal device here is a simple matrix-type transflective liquid crystaldevice displaying full color images.

[0192] As shown in FIG. 18, the liquid crystal device 101 has a liquidcrystal panel 102 containing liquid crystal driving ICs 103 a and 103 bformed in a semiconductor chip and an FPC (flexible printing circuit)104 connected to the liquid crystal panel 102. The liquid crystal device101 also has an illumination device 106, acting as a backlight, at therear surface side of the liquid crystal panel 102.

[0193] The liquid crystal panel 102 includes a first substrate 107 a anda second substrate 107 b bonded to each other with a sealant 108. Thesealant 108 is formed by, for example, screen-printing an epoxy resin ina loop (circular manner) on the inner surface of the first substrate 107a or the second substrate 107 b. Also, the sealant 108 containsspherical or cylindrical conductors 109 formed of a conductive materialand dispersed therein, as shown in FIG. 19.

[0194] The first substrate 107 a has a transparent plate-like base 111 aformed of glass, resin, or the like, as shown in FIG. 19. The base 111 ais provided with a reflecting layer 112 on the inner surface (uppersurface in FIG. 19) thereof. An insulating layer 113 is deposited on thereflecting layer 112, and first electrodes 114 a are formed on theinsulating layer 113 in a striped manner (see FIG. 18) when viewed inthe direction indicated by arrow D. Furthermore, an alignment layer 116a overlies the electrodes. Also, a polarizer 117 a is provided on theouter surface (lower surface in FIG. 19) of the base 111 a by adhesion.

[0195] The distances between the first electrodes 114 a shown in FIG. 18are illustrated considerably larger than the actual distances, for thesake of ease of understanding the arrangement. Hence, the number of thefirst electrodes 114 a overlying the base 111 is, in practice, largerthan the number of the first electrodes 114 a shown in the drawing.

[0196] The second substrate 107 b has a transparent plate-like substrate111 b formed of glass, resin, or the like, as shown in FIG. 19. A colorfilter 118 is disposed on the inner surface (lower surface in FIG. 19)of the base 111 b, and second electrodes 114 are formed on the colorfilter 118 in a striped manner (see FIG. 18) in a directionperpendicular to the first electrodes 114 a. Furthermore, an alignmentlayer 116B overlies the electrodes. Also, a polarizer 117 b is providedon the outer surface (upper surface in FIG. 19) of the base 111 b byadhesion.

[0197] The distances between the second electrodes 114 b shown in FIG.18 are illustrated larger than the actual distances, as in the firstelectrodes, for the sake of ease of understanding the arrangement.Hence, the number of the second electrodes 114 b overlying the base 111is, in practice, larger than the number of the first electrodes 114 bshown in the drawing.

[0198] As shown in FIG. 19, a so-called cell gap, which is the spaceenclosed with the first substrate 107 a, the second substrate 107 b, andthe sealant 108, is filled with a liquid crystal L, such as STN (supertwisted nematic) liquid crystal. A large number of small sphericalspacers 119 are dispersed on the inner surfaces of the first substrate107 a and the second substrate 107 b so as to be present in the cellgap, thus maintaining the cell gap uniform.

[0199] The first electrodes 114 a and the second electrodes 114 b extendso as to intersect each other. Their intersections in plan view arearrayed in a dot matrix when viewed in the direction indicated by arrowD in FIG. 19. The intersections each form a display dot. The colorfilter 118 has R (red), G (green), and B (blue) elements (filterelements) arranged in a predetermined pattern, such as a stripedarrangement, a delta arrangement, or a mosaic arrangement. Each displaydot corresponds to one element of R, G, and B filter elements. Threedisplay dots of R, G, and B define a pixel.

[0200] Images, such as letters and numbers, are displayed on theexternal surface of the second substrate 107 b of the liquid crystalpanel 102 by selectively activating the display dots arrayed in amatrix. The region displaying images as above is a viewing area and isdesignated by arrow V in FIGS. 18 and 19.

[0201] The reflecting layer 112 is formed of a light-reflectingmaterial, such as an APC alloy or aluminium, as in FIG. 19. Thereflecting layer 112 has apertures 121 in the positions corresponding tothe display dots, that is, the intersections of the first electrodes 114a and the second electrodes 114 b. The apertures 121 are thereforearrayed in the same matrix as in the display dots when viewed in thedirection indicated by arrow D in FIG. 19.

[0202] The first electrodes 114 a and the second electrodes 114 b areformed of, for example, transparent conductive ITO (indium tin oxide).The alignment layers 116 a and 116 b are formed by bonding a polyimideresin in a film form having a uniform thickness. The alignment layers116 a and 116 b are subjected to rubbing to determine the initialorientation of the liquid crystal on the surfaces of the first substrate107 a and the second substrate 107 b.

[0203] As shown in FIG. 18, the first substrate 107 a has an area largerthan that of the second substrate 107 b. Thus, the first substrate 107 abonded to the second substrate 107 b with the sealant 108 has aprotrusion 107 c from the second substrate 107 b. The protrusion 107 cis provided with lead wires 114 c extending from the first electrodes114 a, lead wires 114 d conducting to the second electrodes 114 b of thesecond substrate 107 b through the conductors 109 (see FIG. 19) in thesealant 108, a metal wire 114 e connected to an input terminal, or inputbump, of the liquid crystal driving IC 103 a, another metal wire 114 fconnected to an input bump of the liquid crystal driving IC 103 b, andother wires, in a predetermined pattern thereon.

[0204] In this instance, the lead wires 114 c extending from the firstelectrodes 114 a and the lead wires 114 d electrically connected to thesecond electrodes 114 b are formed of ITO, which is the same material asthe constituent of these electrodes. The metal wires 114 e and 114 fserving as input wires of the respective liquid crystal driving ICs 103a and 103 b are formed of a metal having a low resistance, such as anAPC alloy. The APC alloy mainly contains Ag and further contains Pd andCu, having a composition constituted of, for example, 98% by weight ofAg, 1% by weight of Pd, and 1% by weight of Cu.

[0205] The liquid crystal driving ICs 103 a and 103 b are adhered on thesurface of the protrusion 107 c with an ACF (anisotropic conductivefilm) 122. In other words, the liquid crystal panel of this embodimentcontains semiconductor chips directly mounted on the substrate to form aCOG (chip on glass) structure. In this COG mounting structure,conducting particles contained in the ACF 122 electrically connect theinput bumps of the liquid crystal driving ICs 103 a and 103 b to themetal wires 114 e and 114 f respectively, and the output bumps of theliquid crystal driving ICs 103 a and 103 b to the lead wires 114 c and114 d respectively.

[0206] The FPC 104, shown in FIG. 18, has a flexible resin film 123, acircuit 126 including chip components 124, and metal wire terminals 127.The circuit 126 is directly mounted on the surface of the resin film 123by soldering or other techniques. The metal wire terminals 127 areformed of a conductive material, such as an APC alloy, Cr, or Cu. Theregion of the FPC 104 having the metal wire terminals 127 are connected,with the ACF 122, to the region of the first substrate 107 a having themetal wires 114 e and 114 f. The metal wires 114 e and 114 f areelectrically connected to the metal wire terminals 127 of the FPC 104 bythe conducting particles in the ACF 122.

[0207] External terminals 131 connected to an external circuit not shownin the drawing are formed at the end of the opposite side of the FPC104. The liquid crystal driving ICs 103 a and 103 b are driven accordingto signals transmitted from the external circuit. Thus, a scanningsignal is supplied to either the first electrodes 114 a or the secondelectrodes 114 b and data is supplied to the other. Thus, the displaydots arrayed in the viewing area V are each voltage-controlled, andconsequently the orientation of the liquid crystal L is controlled fromone dot to another.

[0208] The illumination device 106 shown in FIG. 18 has alight-transmitter 132 formed of an acrylic resin or the like, adiffusion sheet 133 disposed on a light-emitting face 132 b of thelight-transmitter 132, a reflection sheet 134 disposed on the faceopposite the light-emitting face 132 b, and an LED (light-emittingdiode) 136 serving as a light source, as shown in FIG. 19.

[0209] The LED 136 is supported by a LED substrate 137 which may beincorporated in a supporting portion (not shown in the drawing)integrated with the light-transmitter 132. By providing the LEDsubstrate 137 in a predetermined position of the supporting portion, theLED 136 is located at a position opposing a light-admitting face 132 a,which is a side face of the light-transmitter 132. Reference numeral 138represents a shock absorbing member for absorbing shocks applied to theliquid crystal panel 102.

[0210] Light emitted from the LED 136 enters the light-transmitter 132through the light-admission face 132 a, and is transmitted while beingreflected at the reflection sheet 134 and the side faces of thelight-transmitter 132. Thus the light is emitted to the outside from thelight-emitting face 132 b through the light-diffusion sheet 133.

[0211] In the liquid crystal device 101 described above, when externallight, such as sun light or room light, is sufficiently bright, theexternal light enters the inside of the liquid crystal panel 102 fromthe second substrate 107 b side. The light is transmitted through theliquid crystal L, and is then reflected at the reflecting layer 112 toreturn to the liquid crystal L. The orientation of the liquid crystal Lis controlled by the electrodes 114 a and 114 b from one display dot ofR, G, or B to another. The light supplied to the liquid crystal L istherefore modulated from one display dot to another. According to themodulation, light capable of passing through the polarizer 117 b andlight incapable of passing through it form images, such as characters ornumerals, to be displayed outside of the liquid crystal panel 102. Thusthe images are reflectively displayed.

[0212] In contrast, when the external light is not sufficiently bright,the LED 136 emits flat light to the light-transmitter 132 through thelight-emitting face 132 b, and the light passes through the apertures121 in the reflecting layer 112 to be supplied to the liquid crystal L.The supplied light is modulated from one display dot to another by theliquid crystal L subjected to orientation control. Thus, images aretransmissively displayed outside.

[0213] The liquid crystal device 101 having the above-describedstructure is manufactured by, for example, a method shown in FIG. 17. Inthis manufacturing method, a series of steps P1 to P6 is for forming thefirst substrate 107 a, and a series of steps P11 to P14 is for formingthe second substrate 107 b. The processes of forming the first andsecond substrates are normally independent of each other.

[0214] In the process of forming the first substrate, first, areflecting layer 112 for a plurality of liquid crystal panels 102 isformed by photolithography or the like on the surface of a transparentstarting mother substrate formed of a light-transmissive glass, resin,or the like having a large area. An insulating layer 113 is deposited onthe reflecting layer 112 by a known deposition technique (step P1).Next, first electrodes 114 a, lead wires 114 c and 114 d, and metalwires 114 e and 114 f are formed by the photolithography or thelike(step P2).

[0215] Then, an alignment layer 116 a is formed by coating, printing, orthe like (step P3). The alignment layer 116 a is subjected to rubbing todetermine the initial orientation of the liquid crystal (step P4). Next,a sealant 108 is formed in a loop by, for example, screen-printing orthe like (step P5), and spherical spacers 119 are dispersed on thesealant 108 (step P6). Thus, a first mother substrate having a largearea is completed which has a plurality of panel patterns disposed onthe first substrate 107 a of the liquid crystal panel 102.

[0216] In addition to the first substrate forming process, a process offorming the second substrate (steps 11 to 14 in FIG. 17) is performed.First, color filters 118 for the plurality of liquid crystal panel 102are formed on the surface of another wide starting mother substrateformed of a light-transmissive glass, resin, or the like (step P11). Thestep of forming the color filters 118 is performed by the manufacturingmethod shown in FIG. 6 in which R, G, and B filter elements are formedwith the liquid discharge device 16 shown in FIG. 8, with the liquiddischarge head 22 controlled according to the method shown in FIGS. 1 to4. The color filter manufacturing method and the liquid discharge head22 controlling method are the same as the method described above and thedescription is omitted.

[0217] After the color filters 1, or the color filters 118, are formedon the mother substrate 12, or the starting mother substrate, as shownin FIG. 6(d), the second electrodes 114 b are formed (step P12) byphotolithography. Then, the alignment layer 116 b are deposited bycoating, printing, or the like (step P13). Next, the alignment layer 116b is subjected to rubbing to determine the initial orientation of theliquid crystal (step P14). Thus, a second mother substrate having alarge area is completed which has a plurality of panel patterns disposedon the second substrate 107 b of the liquid crystal panel 102.

[0218] After being completed as above, the wide first and second mothersubstrates are aligned and bonded to each other with the sealant 108therebetween (step P21). Thus, an empty panel structure is completedwhich includes panel portions for the plurality of liquid crystal panelsand which is not filled with the liquid crystal.

[0219] Then, scribed grooves for cutting into pieces are formed inpredetermined positions of the panel structure, and the panel structureis broken to be cut into sections by stress or heat application or lightexposure to scribed grooves of the panel structure (step P22). Thus, arectangular empty panel structure is formed with liquid crystal inlets110 (see FIG. 18) of the sealants 108 of the liquid crystal panelportions exposed.

[0220] Then, The liquid crystal L is injected into the inside of eachliquid crystal panel portion through the corresponding exposed liquidcrystal inlet 110, and the liquid crystal inlet 110 is sealed with resinor the like (step P23). In general, the injection of the liquid crystalis performed by reducing the internal pressure of the liquid crystalpanel portion to make use of differential pressure. For example, avessel in which a liquid crystal is reserved and the rectangular emptypanel are placed in a chamber. The chamber is evacuated to produce avacuum, and the rectangular empty panel is immersed in the liquidcrystal in the evacuated chamber. When the chamber is subsequentlyopened to atmospheric pressure, the liquid crystal is introduced intothe panel through the liquid crystal inlet by the atmospheric pressurewhich pressurizes the liquid crystal due to the evacuated inside of thepanel. After the liquid crystal injection, the rectangular panel iscleaned in step P24 because of liquid crystal trapped around the liquidcrystal panel structure.

[0221] Then, scribed grooves are formed again in predetermined positionsof the rectangular panel after the liquid crystal injection and thecleaning. The rectangular panel is cut into pieces along the scribedgrooves. Thus, a plurality of liquid crystal panels 102 are separated(step P25). Each liquid crystal panel 102 formed as above isincorporated with the liquid crystal driving ICs 103 a and 103 b and theillumination device 106 serving as a backlight, and further connected tothe FPC 104. Thus, a desired liquid crystal device is completed (stepP26).

[0222] The color filter included in the liquid crystal device ismanufactured by any one of the plurality of techniques described in theabove-described embodiment for the color filter and the method formanufacturing the color filter. Therefore, when the color filter 118shown in FIG. 19 is manufactured as in the color filter 1 shown in FIG.5(a), the filter element materials are discharged in a plurality of(two, in the embodiment) sweeping directions different from one another,thus forming filter elements. As a result, color shading resulting fromthe sweeping direction is reduced and, therefore, the quality ofdisplayed images can be improved.

[0223] When the color filter is manufactured by the method shown inFIGS. 3 and 4, each of the filter elements 3 are formed by repeating thesweeping of the liquid discharge head 22 N times (for example, 4 times),but not once, to deposit ink a plurality of times so that the resultingfilter element 3 has a predetermined thickness. As a result, thicknessvariation between the filter elements 3 can be prevented, even if thereis a variation of the ink discharge rate between the plurality ofnozzles 27, and the above-described striped color shading is furtherreduced. Thus, the light-transmission characteristics of the colorfilter can become horizontally uniform.

[0224] Also, in the liquid crystal device and the method formanufacturing the same of the present embodiment, the filter elements 3are formed by discharging ink from the liquid discharge head 22 of theliquid discharge device 16 shown in FIG. 8. Therefore, it is notnecessary to apply a complicated process as in a method usingphotolithography, and waste of materials can be eliminated.

[0225] The present embodiment illustrates a liquid crystal device,serving as a display device, having a liquid crystal panel. However, thedisplay device may be an electro-optic device other than the liquidcrystal device and which includes, for example, EL elements or a plasmadisplay panel having the above-described color filter. For example, bylayering the color filter including filter elements corresponding to aplurality of dots capable of emitting electroluminescent light, the sameeffects as in the above-described embodiment are produced.

[0226] [Display Device (Electro-Optic Device) Including EL Elements andMethod for Manufacturing the Same]

[0227]FIG. 20 shows a method for manufacturing an EL device according toan embodiment of a method for manufacturing a display device(electro-optic device) of the present invention. FIG. 21 shows sectionalviews of major steps of manufacturing an EL device and the finalstructure of the resulting EL device. As shown in FIG. 21(d), the ELdevice 201 includes pixel electrodes 202 on a transparent substrate 204and banks 205 between the pixel electrodes 202 in a grid manner whenviewed in the direction indicated by arrow G. A hole injection film 220is deposited in each recess in the grid, and one of luminescent films ofR, G, and B colors 203R, 203G, and 203B is deposited in each recess ofthe grid so as to be arrayed in a predetermined arrangement, such as astriped arrangement when viewed in the direction indicated by arrow G.In addition, an opposing electrode 213 is formed on the luminescentfilms and, thus, the EL device 201 is completed.

[0228] When the pixel electrodes 202 are driven by two-terminal activeelements, such as TFDs (thin-film diodes), the opposing electrode 213 isformed in a striped manner when viewed in the direction indicated byarrow G. When the pixel electrodes 202 are driven by three-terminalactive elements, such as TFTs (thin-film transistors), the opposingelectrode 213 is formed in a single face.

[0229] Each of the regions between the pixel electrodes 202 and theopposing electrodes 213 defines a display dot, and three dots of R, G,and B colors define a unit serving as a pixel. By controlling currentflowing in each display dot, a desired dot of the plurality of displaydots is selectively allowed to emit light and, thus, a desired fullcolor image can be displayed in the direction indicated by arrow H.

[0230] The EL device 201 is manufactured by, for example, a method shownin FIG. 20. Specifically, as shown in step P51 and FIG. 21(a), activeelements, such as TFD elements and TFT elements, are formed on thesurface of the transparent substrate 204 and, further, the pixelelectrodes 202 are formed. These are formed by photolithography, vacuumdeposition, sputtering, pyrosol deposition, or the like. The pixelelectrodes 202 are formed of ITO, tin oxide, a complex oxide of indiumoxide and zinc oxide, or the like.

[0231] Next, as shown in step P52 and FIG. 21(a), the banks 205, servingas barrier walls, are formed by a known patterning technique, such asphotolithography, so as to fill the gaps between the transparent pixelelectrodes 202. Thus, the banks increase contrast and prevent colormixture of the luminescent materials and leakage of light from the gapsbetween the pixels. The material of the banks 205 is not particularlylimited, as long as it has resistance against solvents of the ELluminescent materials. Preferably, it is capable of being subjected totetrafluoroethylenation by fluorocarbon plasma polymerization, and maybe an organic material, such as an acrylic resin, an epoxy resin, orphotosensitive polyimide.

[0232] Next, the transparent substrate 204 is subjected to successiveplasma polymerization using oxygen gas and fluorocarbon plasma (stepP53) before an ink for the hole injection films, acting as a functionalliquid material, is applied. This treatment allows the surface ofpolyimide to have water-repellency and the surface of ITO to havehydrophilicity, thus controlling the wettability of the surface at thesubstrate side where droplets of the ink are deposited to form apattern. A plasma generator may generate plasma in a vacuum or in theatmosphere.

[0233] Next, as shown in step P54 and FIG. 21(a), the ink for holeinjection films is discharged from the liquid discharge head 22 of theliquid discharge device 16 shown in FIG. 8 to form a pattern on thepixel electrodes 202. Specifically, the liquid discharge head 22 iscontrolled by any one of the methods shown in FIGS. 1, 2, 3, and 4.Subsequently, the solvent is removed for 20 minutes in a vacuum (1 Torr)at room temperature (step P55). Then, the substrate is subjected to heattreatment at 20° C. (on a hot plate) for 10 minutes to complete holeinjection films 220 not compatible with the ink for luminescent films(step P56). The resulting luminescent films had a thickness of 40 nm, inpractice, under the above-described conditions.

[0234] Turning to step P57 and FIG. 21(b), inks for R luminescent filmsand G luminescent films, which are functional liquid EL materials, aredischarged onto the hole injection films 220 in filter-element-formingregions 7. These inks for the luminescent films are also discharged fromthe liquid discharge head 22 of the liquid discharge device 16 shown inFIG. 8. The liquid discharge head 22 is controlled by any one of themethods shown in FIGS. 1 to 4. In this instance, the color phases of thecolor filter are replaced with the luminescent colors of the ELmaterials. Ink jetting allows fine patterning for a short time. Also, byvarying the solid content in the ink composition and the dischargequantity, the resulting thickness can be varied.

[0235] After the application of the inks for luminescent films, thesolvent is removed, for example, for 20 minutes in a vacuum (1 Torr) atroom temperature (step P58). Subsequently, conjugation is performed byheating at 150° C. in an atmosphere of nitrogen for 4 hours to completethe R color luminescent films 203R and the G color luminescent films203G (step P59). The resulting films had thickness of 50 nm, inpractice, under the above-described conditions. The resultingluminescent films, which are conjugated by heating, are not dissolved insolvents.

[0236] The hole injection films 220 may be subjected to successiveplasma polymerization using oxygen gas and fluorocarbon gas plasmabefore the formation of the luminescent films. Thus, the hole injectionfilms 220 have a fluoride layer which increases the ionization potentialand, consequently, increases the hole injection efficiency. Thus, anorganic EL device having a high luminous efficiency can be achieved.

[0237] Turning to step P60 and FIG. 21(c), B-color luminescent films203B, which are formed of a functional liquid EL material, are layeredon the R-color luminescent films 203R and G-color luminescent films 203Gand the hole injection films 220, in the display dots. Thus, not onlyare the three primary colors, R, G, and B formed, but also step heightsfrom the R- and G-color luminescent films 203R and 203G to the banks 205are eliminated to be flattened. As a result, a short circuit can surelybe prevented between the upper and lower electrodes. By controlling thethickness of the B-color luminescent films 203B, B-color luminescentfilms layered on the R-color luminescent films 203R or the G-colorluminescent films 203G are formed which serve as electron injectiontransport layers and does not emit B color.

[0238] In order to form the B-color luminescent films 203B as above,spin coating may be applied, which is generally known as a wettechnique, or ink jetting as in the formation of the R- and G-colorluminescent films 203R, 203G, may be applied.

[0239] Then, as shown in step P61 and FIG. 21(d), the opposing electrode213 is formed and, thus, a desired EL device 201 is completed. When theopposing electrode 213 is in a plane, it is formed of Mg, Mg, Al, Li, orthe like by a film deposition, such as vapor deposition or sputtering.When the opposing electrode 213 is in a striped manner, an electrodelayer is deposited and is subsequently subjected to patterning such as aphotolithography.

[0240] Since the above-described EL device 201 and its manufacturingmethod employ any one of the ink jet head controlling techniques shownin FIGS. 1 to 4, striped color shading resulting from the sweepingdirection can be reduced, as in above. The hole injection films 220 andthe R, G, and B luminescent films 203R, 203G and 203B in the displaydots, shown FIG. 21 are each formed by repeating the sweeping of the inkjet head (see FIG. 1) N times (for example, 4 times), but not once, todeposit ink a plurality of times, and thus, the resulting hole injectionfilms and luminescent films 3 have predetermined thicknesses. As aresult, thickness variation between the display dots can be prevented,even if there is a variation of the ink discharge quantity between theplurality of nozzles 27, and the above-described striped color shadingis further reduced. Thus, the EL device 201 can have a horizontallyuniform distribution of light emission of the light-emitting surface.

[0241] Also, in the EL device and the EL device manufacturing method ofthe present embodiment, the R, G, and B display dots are formed bydischarging ink from the liquid discharge head 22 of the liquiddischarge device 16 shown in FIG. 8. Therefore, it is not necessary toapply a complicated process as in a method using photolithography, andwaste of materials can be eliminated.

[0242] [Method and Device for Manufacturing a Color Filter]

[0243] An embodiment of a method and a device for manufacturing a colorfilter will now be described with reference to drawings. First, thecolor filter to be manufactured will be illustrated before a descriptionof the device for manufacturing the color filter. FIG. 38 is afragmentary enlarged view of a color filter. FIG. 38(A) is a plan viewof the color filter and FIG. 38(B) is a sectional view taken along lineX-X in FIG. 38(A). The same parts of the color filter shown in FIG. 38as in the color filter 1 of the foregoing embodiment shown in FIG. 5 aredesignated by the same reference numerals.

[0244] (Structure of the Color Filter)

[0245] The color filter 1 shown in FIG. 38(A) has a plurality of filterelements 3 arrayed in a matrix manner. The boundaries between the filterelements 3 are defined by the barrier walls 6. Each filter element 3 isfilled with one of liquid color filter materials, or filter elementmaterials 13, serving as inks for red (R), green (G), and blue (B). Inthe color filter shown in FIG. 38, red, green, and blue colors arearrayed in a so-called mosaic arrangement, but they may be in a stripedarrangement or a delta arrangement, as described above.

[0246] As shown in FIG. 38(B), the color filter 1 includes alight-transmissive substrate 2 and light-transmissive barrier walls 6.The regions not having the barrier walls 6, from which the barrier wallsare removed, are filter-element-forming regions 7 where the filterelements 3 are disposed. A protective film 4 and an electrode layer 5are layered on the upper surfaces of the barrier walls 6 and the filterelements 3.

[0247] (Structure of the Color Filter Manufacturing Device)

[0248] The structure of a device for manufacturing a color filter willnow be described with reference to drawings. FIG. 27 is a perspectiveview, part of which is omitted, of a liquid discharge device included ina color filter manufacturing device of the present invention. The colorfilter manufacturing device is intended to manufacture the color filter1 included in a color liquid crystal panel acting as an electro-opticdevice. The color filter manufacturing device includes a liquiddischarge device having basically the same structure as that of theliquid discharge device 16 described above.

[0249] (Structure of the Liquid Discharge Device)

[0250] This manufacturing device has three liquid discharge devices405R, 405G, and 405B, as shown in FIG. 27. These liquid dischargedevices 405R, 405G, and 405B discharge three colors, R, G, and B of thefilter element materials 13, which are liquid ink color filtermaterials, respectively. The liquid discharge devices 405R, 405G, and405B are arranged substantially in series, in the manufacturing device.The liquid discharge devices 405R, 405G, and 405B each have anintegrated control device, not shown in the drawing, for controlling theoperations of their components.

[0251] Also, the liquid discharge devices 405R, 405G, and 405B are eachconnected to a carrier robot, not shown in the drawing, for carrying themother substrate 12, one by one, to and from the corresponding liquiddischarge device 405R, 405G, or 405B. Each of the liquid dischargedevices 405R, 405G, and 405B can contain, for example, six mothersubstrates 12, and is joined to a multi-step baking oven, not shown inthe drawing, for heating the mother substrates 12 for example, to 120°C. for 5 minutes and, subsequently, for drying discharged filter elementmaterials 13.

[0252] The liquid discharge devices 405R, 405G, and 405B each have athermal clean chamber 422 which is a hollow body case, as shown in FIG.27. The inside of the thermal clean chamber 422 can be controlled to atemperature of, for example, 20±0.5° C. and does not allow dust to enterfrom the outside, in order to ensure that stable, preferred drawings canbe performed by ink jetting therein. The thermal clean chamber 422contains a liquid discharging body 423.

[0253] The liquid discharging body 423 has an X-axis air slide table424, as shown in FIG. 27. A sweeping driver 425 including a linearmotor, not shown in the drawing, is disposed on the X-axis air slidetable 424. The sweeping driver 425 has a pedestal, not shown in thedrawing, for fixing the mother substrate 12 by, for example, aspiration.The pedestal is moved in the sweeping direction X, with respect to themother substrate 12.

[0254] The liquid discharging body 423 also has a shifting driver 427serving as a Y-axis table above the X-axis air slide table 424, as shownin FIG. 27. The shifting driver 427 shifts a head unit 420 fordischarging the filter element material 13 in, for example, the verticaldirection, in the Y-axis direction, or the shifting direction, withrespect to the mother substrate 12. For the sake of description of theorientation relationship, FIG. 27 illustrate the head unit 420 in solidline, as if it were suspended in the air.

[0255] The liquid discharging body 423 also includes an imaging devicesuch as a camera, not shown in the drawing, for recognizing thelocations of the ink jet head 421 and the mother substrate 12 to controlthe locations. The positions of the head unit 420 and the pedestal canbe controlled by a position controlling technique using a pulse motor,feedback using a servomotor, or any other controlling technique. Thecomponents of the above-described liquid discharge device, including theimaging device have basically the same structure as in the liquiddischarge device shown in FIGS. 8 and 9.

[0256] The liquid discharging body 423 has a wiping unit 481 for wipinga face of the head unit 420 for discharging the filter element material13, as shown in FIG. 27. The wiping unit 481 has a wiping member, notshown in the drawing, including, for example, a cloth member and arubber sheet which are layered together, wherein the wiping member isappropriately rolled from one end thereof and an appearing new facethereof wipes the face discharging the filter element material 13 oneafter another. Thus, the filter element material 13 trapped on thedischarging face is removed and, thus, nozzles 466 described later areprevented from clogging.

[0257] In addition, the liquid discharging body 423 includes an inksystem 482. The ink system 482 has an ink tank 483 for reserving thefilter element material 13, a supply pipe 478 capable of distributingthe filter element material 13, and a pump, not shown in the drawing,for supplying the filter element material 13 from the ink tank 483 tothe head unit 420 through the supply pipe 478. The supply pipe 478 isschematically illustrated in FIG. 27, and is wired from the ink tank 483to the shifting driver 427 without affecting the movement of the headunit 420 so as to supply the filter element material 13 to the unit head420 from the upper region of the shifting driver 427 for sweeping thehead unit 420.

[0258] The liquid discharging body 423 further has a weighing unit 485for measuring the quantity of the filter element material 13 dischargedfrom the head unit 420.

[0259] Furthermore, the liquid discharging body 423 has a pair ofmissing-dot detectors 487 including an optical sensor or the like, fordetecting the state of the filter element material 13 discharged fromthe head unit 420. The missing-dot detectors 487 are disposed in adirection, for example, the X-axis direction, perpendicular to thedirection in which droplets are discharged from the head unit 420 suchthat the light source and photoreceptor of the optical sensor, not shownin the drawing, oppose each other and are separated by a space throughwhich droplets 8 discharged from the head unit 420 pass. The missing-dotdetectors 487 are also disposed at the Y-axis direction side, orshifting direction side, of the head unit 420 so that missing dots aredetected by observing the state of discharge every time when the headunit 420 is shifted to discharge the filter element material 13.

[0260] In the head unit 420, head devices 433 are arranged in two linesfor discharging the filter element material 13, but the details will bedescribed below. Accordingly, the pair of missing-dot defectors 487 aredisposed to observe the state of discharge from the respective headdevice lines.

[0261] (Structure of the Head Unit)

[0262] The structure of the head unit 420 will now be described. FIG. 28is a plan view of the head unit included in the liquid discharge device.FIG. 29 is a side view of the head unit. FIG. 30 is a front view of thehead unit. FIG. 31 is a sectional view of the head unit.

[0263] The head unit 420 has head bodies 430 and an ink supply portion431, as shown in FIGS. 28 to 31. Each head body 430 has a flat-shapedcarriage 426 and a plurality of head devices 433 having substantiallythe same shape, mounted on the carriage 426.

[0264]FIG. 32 is an exploded perspective view of the head deviceincluded in the head unit. The head device 433 has a rectangular printboard 435, as shown in FIG. 32. The print board 435 is provided withvarious electric parts 436 and electrical wires therein. The print board435 has a window 437 therethrough in one side in the longitudinaldirection (middle and right in FIG. 32). The print board 435 also haspassages 438 for delivering the filter element material 13 serving asthe ink at both sides of the window 437.

[0265] An ink jet head 421 is fixed to one surface (middle and lowerside in the FIG. 32) of the print board 435 with a fixing member 440,located substantially at one side of the print board in the longitudinaldirection (middle and right side in FIG. 32). The ink jet head 421 isrectangular and is fixed such that the longitudinal direction thereof isparallel to the longitudinal direction of the print board 435. The inkjet heads included in the respective head devices 433 have substantiallythe same shape, and, for example, satisfy predetermined specificationsand, hence, screened to predetermined quality. Specifically, it ispreferable that the ink jet head 421 have the same number of nozzlesformed at the same position, from the viewpoint of the efficiency andprecision in the assembly of the ink jet heads on the carriage.Furthermore, use of products manufactured through the same manufacturingand assembling processes eliminates the need for preparing a specificproduct, thus reducing costs.

[0266] Connectors 441 electrically connected to the ink jet head 421with electric wires are fixed to the other surface (middle and upperside in the FIG. 32) of the print board 435, located substantially atsubstantially the other side of the print board in the longitudinaldirection (middle and left side in FIG. 32). An electric wire (includinga power cable and a signal cable) 442 connected to the shifting driver427 is connected to connectors 441 without affecting the movement of thehead unit 420, as schematically shown in FIG. 27. The electric wire 442is intended to connect a control device, not shown in the drawing, andthe head unit 420. Specifically, the electric wire 442 runs from theshifting driver 427 to each connector 441 through outer sides of thehead unit 420 at both sides with respect to two lines of the arrangementof the head devices 433, as schematically indicated by two-dot chainlines in FIGS. 28 to 30, thus preventing the generation of electricnoise.

[0267] An ink introducer 443 is attached to the other surface (middleand upper side in the FIG. 32) of the print board 435, locatedsubstantially at substantially one side of the print board in thelongitudinal direction (middle and right side in FIG. 32), correspondingto the ink jet head 421. The ink introducer 443 has substantiallycylindrical positioning tubes 445 combining positioning pins 444 of thefixing member 440 disposed through the print board 435; and an engagingclaw 446 for engaging to the print board 435.

[0268] The ink introducer 443 has a pair of substantially cylindrical,tapered couplers 448. The couplers 448 each have an opening, not shownin the drawing, substantially fluid-tightly communicating with thepassages 438 at the basal portion thereof on the print board 435 sidethereof and a hole, not shown in the drawing, in the end thereof forpassing the filter element material 13.

[0269] The coupler 448 is joined to a sealing coupler 450 at the endthereof, as shown in FIGS. 29 to 31. The sealing coupler 450 is formedin a substantially cylindrical form to plug the coupler 448 thereintosubstantially fluid-tightly, and has a sealing member 449 in the endthereof.

[0270]FIG. 33 is an exploded perspective view of the ink jet head. FIG.34 is a schematic illustration of the section of the ink jet headdischarging the filter element material. FIG. 34(A) shows the statebefore discharging the filter element material; FIG. 34(B) shows thestate of discharging the filter element material by contraction of apiezoelectric vibrator; and FIG. 34(C) shows the state immediately afterdischarging the filter element material. FIG. 35 is a schematicillustration of the discharge quantity of the filter element materialfrom the ink jet head. FIG. 36 is a schematic illustration of thearrangement of the ink jet heads. FIG. 37 is a fragmentary enlarged viewof FIG. 36.

[0271] The ink jet head 421 has a substantial rectangular holder 451, asshown in FIG. 33. The holder 451 has piezoelectric vibrators in twolines, which may be 180 piezoelectric elements, in the longitudinaldirection thereof. The holder 451 also has through holes 453communicating with the passages 438 at the center of the longer sidesthereof for passing the filter element material 13 acting as ink.

[0272] A synthetic resin elastic sheet 455 is integrally attached ontothe upper surface of the holder 451, where the piezoelectric vibrators452 are disposed, as shown in FIG. 33. The elastic sheet 455 hascommunicating holes 456 communicating with the through holes 453. Theelastic sheet 455 also has engaging holes 458 to engage with positioningclaws provided at substantially four comers on the upper surface of theholder 451, thus being positioned and integrally fixed onto the uppersurface of the holder 451.

[0273] A passage-forming plate 460 is disposed on the upper surface ofthe elastic sheet 455. The passage-forming plate 460 has two lines of180 nozzle slots 461 extending in the longitudinal direction such thatthe nozzle slots 461 corresponds to the respective piezoelectricvibrators 452 arranged in such a manner that the longitudinal directionthereof is parallel to the width direction of the holder 451: openings462 spreading in the longitudinal direction of the holder 451 at oneside of each line of the nozzle slots 461; and passing holes 463continuously communicating with the communicating holes 456 of theelastic sheet 455. The passage-forming plate 460 also has engaging holes458 to engage with positioning claws provided at substantially fourcomers on the upper surface of the holder 451, thus being positioned andfixed onto the upper surface of the holder 451 together with the elasticsheet 455.

[0274] Also, a substantially plane nozzle plate 465 is disposed on thesurface of the passage-forming plate 460. The nozzle plate 465 has twolines of 180 substantially circular nozzles 466 extending in thelongitudinal direction of the holder 451, having a length within 25.4 mm(1 inch) such that the nozzles 466 correspond to the respective nozzleslots 461. The nozzle plate 465 also has engaging holes 458 to engagewith positioning claws 457 provided at substantially four corners on theupper surface of the holder 451, thus being positioned and integrallyfixed to the upper surface of the holder 451 together with the elasticsheet 455 and the passage-forming plate 460.

[0275] The layers of the elastic sheet 455, the passage-forming plate460, and the nozzle plate 465 define partitioned liquid reservoirs 467in the openings 462 of the passage-forming plate 460, as shown in FIG.34. The liquid reservoirs 467 communicated with the respective nozzleslots 461 through supply passes 468. Thus, ink jet head 421 dischargesthe filter element material 13 in an amount in the range of 2 to 13 pL,for example, 10 pL, at a rate of 7±2 m/s, from the nozzles by theoperation of the piezoelectric vibrators 452 which pressurizes theinside of the nozzle slots 461. Specifically, by applying apredetermined pulsed voltage Vh to the piezoelectric vibrator 452 toexpand and contract in the direction indicated by arrow Q, assequentially shown in (A) to (C) of FIG. 34, filter element material 13is compressed and a predetermined amount of droplet 8 is discharged fromthe corresponding nozzle 466.

[0276] As described in the forgoing embodiment, the discharge quantityof the ink jet head 421 varies, and it becomes larger at both ends ofthe nozzle line, as shown in FIG. 35. Accordingly, it may be controlledsuch that some nozzles 466 having a discharge quantity variation of 5%or less, that is, 10 nozzles 466 at each end of the nozzle line, do notdischarge the filter element material 13.

[0277] The head body 430 of the head unit 420 includes a plurality ofhead devices 433 each having the ink jet head 421, in an arrangement, asshown in FIGS. 27 to 31. The head devices 433 are arranged on thecarriage 426 such that the alignments thereof are tilted in the sweepingdirection, or X-axis direction, with respect to the shifting direction,or Y-axis direction, perpendicular to the sweeping direction, as shownin FIG. 36. For example, the head devices are arrayed in two lines, eachconstituted of six head devices 433 aligned to form a line slightlytilted with respect to the Y-axis direction. This is because, while theintervals between the ink jet heads 421 can not be reduced because ofthe narrow side length of the head devices 433 larger than that of theink jet heads 421, the lines of the nozzles 466 need to be continuouslyarranged in the Y-axis direction.

[0278] In addition, the head devices 433 of the head body 430 arearranged such that, while the longitudinal direction of the ink jetheads 421 is tilted with respect to the X-axis direction, the connectors441 of the head devices in one alignment are located at the oppositeside with respect to the connectors 441 in the other alignment, in asubstantially symmetrical manner with respect to a point. The tilt ofeach head device 433 is such that each line of the nozzles 466 extendingin the longitudinal direction of the ink jet head 421 forms an angle of,for example, 57.1° with the X-axis direction.

[0279] Also, the head devices 433 are in a substantially staggeredarrangement. In other words, the head devices 433 are arranged so as notto be in parallel with the aligning direction. Specifically, as shown inFIGS. 28 to 31 and 36, the ink jet heads 421 are arranged in twostaggered alignments in the Y axis direction so that the lines ofnozzles 466 of twelve ink jet heads 421 are continuously aligned in theY-axis direction.

[0280] Details will be illustrated with reference to FIGS. 36 and 37.The lines of the nozzles 466 extending in the longitudinal direction ofthe ink jet head 421 are tilted with respect to the X-axis direction.The two lines of the nozzles 466 in one ink jet head 421 have regions A(A in FIG. 37) in which nozzles 466 within the tenth from the end of onenozzle line, which do not discharge the filter element material 13, arelocated between two lines extending in the X-axis direction from theeleventh nozzles 466 in both nozzle lines which discharge the filterelement material 13. Hence, one ink jet head 421 has regions A whichdoes not have two nozzles 466 on a line extending in the X-axisdirection.

[0281] Therefore, in region B (B in FIG. 37) which have two nozzles 466on a line extending in the X-axis direction, the head devices 433 arenot arranged in parallel with each other in the X-axis direction asshown in FIGS. 36 and 37. In addition, region A in one alignment of thehead devices 433, which has only one nozzle on a line extending in theX-axis direction, and region A in the other alignment of the headdevices 433, which has only one nozzle on a line extending in the X-axisdirection, are aligned in parallel with each other in the X-axisdirection, and a combination of two ink jet heads 421 between twoalignments ensures two nozzles 466 on a line extending in the X-axisdirection. Hence, the ink jet heads 421 are arranged in a staggeredmanner such that, in the region having the ink jet heads 421, anyposition always has two nozzles 466 on a line extending in the X-axisdirection. The nozzles in region x where the nozzles 466 do notdischarge the filter element material 13 are not counted for two nozzles466 on a line in the X-axis direction. Thus, two of the nozzles 466swept in the X-axis direction to discharge ink are always on a line inthat direction, and these two nozzles 466 discharge the ink to oneposition, as described later. If only one nozzle 466 discharges ink toform one element, the variation of the discharge quantity between thenozzles 466 may affect the variation of characteristics of the resultingelements and degrades the yield of the elements. By performing dischargefrom different nozzles 466 to form one element, the variation ofdischarge quantity between the nozzles 466 can be dispersed and, thus,the characteristics can be uniform between the elements and the yieldcan be increased.

[0282] The ink supply portion 431 has a pair of flat mounting plates 471disposed corresponding to the two lines of the head bodies 430 and aplurality of supply bodies 472 mounted on the mounting plates 471, asshown in FIGS. 28 to 31. Each supply body 472 has a substantially longthin cylindrical piston 474. The piston 474 is installed with a fixture473 so as to extend through the mounting plate 471 and to be movable inthe axis direction. The piston 474 of the supply body 472 is urged inthe direction from the mounting plate 471 to the head device 433 by acoil spring 475 or the like. FIG. 28 shows only one of the twoalignments of ink supplies 431 corresponding to the alignments of thehead devices 433 and the other is omitted for description convenience.

[0283] The piston 474 has a flange 476 at the end thereof at the headdevice 433 side. The flange 476 protrudes from the periphery of thepiston 474 in a brim-like manner, and the end surface of the flange 476is pressed to the sealing member 449 of the ink introducer 443 of thehead device 433, opposing the urge of the coil spring 475. Also, a joint477 is provided at the other end of the piston opposite the end havingthe flange 476 of the piston 474. One end of the supply pipe 478 throughwhich the filter element material 13 flows is connected to the joint477, as schematically shown in FIG. 27.

[0284] As described above, the supply pipe 478 are connected to theshifting driver 427 so as not to affect the movement of the head unit420, as schematically shown in FIG. 27. It runs from the shifting driver427 to the substantially middle position between the two alignments ofthe ink supply upside of the head unit 420 and is then divided in aradial manner to reach the joints 477 of the ink supply portions 431, asschematically indicated by dotted chain lines in FIGS. 28 to 30.

[0285] Then, each ink supply portion 431 supplies the filter elementmaterial 13 to the ink introducer 443 of the corresponding head device433 through the supply pipe 478. The filter element material 13 suppliedto the ink introducer 443 is further sent to the ink jet head 421, andappropriately discharged in a droplet 8 form from the nozzles 466 of theelectrically controlled ink jet head 421.

[0286] (Operation During Color Filter Manufacturing)

[0287] The operation when the color filter 1 is manufactured using thecolor filter manufacturing device according to the embodiment will nowbe illustrated with reference to drawings. FIG. 39 is a sectional viewshowing the steps of manufacturing the color filter 1 using theabove-described color filter manufacturing device.

[0288] First, the surface of the mother substrate 12, which may be atransparent non-alkaline glass substrate having a thickness of 0.7 mm, alength of 38 cm, and a width of 30 cm, is washed with a cleaning fluidwhich is hot concentrated sulfuric acid containing 1% by mass of aqueoushydrogen peroxide. After cleaning, the mother substrate 12 is rinsedwith pure water and dried in the air to prepare a clean surface of thesubstrate. On the surface of the mother substrate 12, for example, achromium film is deposited at an average thickness of 0.2 μm bysputtering to form a metal layer 6 a (Step S1 in FIG. 39).

[0289] After the mother substrate 12 is dried at 80° C. for 5 minutes ona hot plate, a photoresist layer, not shown in the drawing, is depositedon the surface of the metal layer 6 a by, for example, spin-coating. Amask film, not shown in the drawing, in which a desired matrix patternis drawn is brought into tight contact with the surface of the mothersubstrate 12 and is then exposed to ultraviolet light. The exposedmother substrate 12 is immersed in an alkaline developer containing, forexample, 8% by mass of potassium hydroxide to remove the unexposedregions of the photoresist layer, and thus the photoresist layer ispatterned. Then, the exposed metal layer 6 a is etched to be removedwith an etchant mainly containing, for example, hydrochloric acid. Thus,a light-shielding layer 6 b having a predetermined matrix pattern isobtained to serve as a black matrix (step S2 in FIG. 39). Thelight-shielding layer 6 b has a thickness of about 0.2 μm and a width ofabout 22 μm.

[0290] A transparent acrylic photosensitive negative resin composition 6c is further applied on the mother substrate 12 having thelight-shielding layer 6 b by, for example, spin-coating (step S3 in FIG.39). The mother substrate 12 coated with the photosensitive resincomposition 6 c is prebaked at 100° C. for 20 minutes, and issubsequently exposed to ultraviolet light using a mask film, not shownin the drawing, in which a predetermined mask pattern is drawn. Then,the unexposed region of the resin composition is removed by developmentwith an alkaline developer as in above. After being rinsed with purewater, the mother substrate 12 is dried by spinning. For a final drying,after-baking is performed at, for example, 200° C. for 30 minutes tocure the resin portions sufficiently, and thus a bank layer 6 d isformed. The resulting bank layer 6 d has a thickness of about 2.7 μm anda width of about 14 μm. The bank layer 6 d and the light-shielding layer6 b form barrier walls 6 (step S4 in FIG. 39).

[0291] The light-shielding layer 6 b and the bank layer 6 d definefilter-element-forming regions 7 in which colored layer will be formed,by partitioning. In order to improve the ink-wettability of thefilter-element-forming regions 7 (particularly exposed surfaces of themother substrate 12), dry-etching, or plasma polymerization, isperformed. For example, a high voltage is applied to a gas mixture whichis helium containing 20% of oxygen so that an etching spot is formed byplasma polymerization. The mother substrate 12 is passed under theetching spot, thus being subjected to pretreatment.

[0292] Then, filter element materials of red (R), green (G), and blue(B) are introduced, that is, discharged, by ink jetting to thefilter-element-forming regions 7 of the pretreated mother substrate 12,separated by the barrier walls 6 (step 5 in FIG. 39).

[0293] In order to discharging the filter element materials by inkjetting, the head unit 420 are assembled in advance. Also, the quantityof the filter element materials 13 discharged from each nozzle 466 ofthe ink jet heads 421 is set a predetermined amount, for example, 10 pL,in the liquid discharge devices 405R, 405G, and 405B. On the other hand,the barrier walls 6 are formed in a grid pattern on one surface of themother substrate 12 in advance.

[0294] The mother substrate 12 pretreated as described above is carriedto the R color liquid discharge device 405 R by a carrier robot, notshown in the drawing, and placed on the pedestal in the liquid dischargedevice 405R. The mother substrate 12 on the pedestal is fixed by, forexample, aspiration. The pedestal supporting the mother substrate 12 ismoved to a predetermined position by the sweeping driver 425 while theimaging devices, such as various types of camera, observe the positionof the mother substrate 12. The head unit 420 is appropriately shiftedby the shifting driver 427, and the resulting position is observed.Then, the head unit 420 is shifted in the shifting direction, and thedischarge state of the nozzles 466 are checked by the missing-dotdetector 487 to ensure that no discharge failure occurs. Then, the headunit 420 is moved to the initial position.

[0295] Then, the mother substrate 12 supported on the pedestal moved bythe sweeping driver 425 in the X direction. Thus while the head unit 420is relatively swept over the mother substrate 12, predetermined nozzles466 of the ink jet head 421 appropriately discharge the filter elementmaterial 13 to fill the recessed regions partitioned by the barrierwalls 6 of the mother substrate 12. The discharge from the nozzles 466is controlled by a control device, not shown in the drawing, such thatsome nozzles 466 located in predetermined regions X, shown in FIG. 37,at both ends of the nozzle lines, which may be 10 nozzles 466 from eachend of the nozzle lines, do not discharge the filter element material 13and the other 160 nozzles in the middle of the nozzle lines which canoffer a relatively uniform discharge quantity discharge the filterelement material 13.

[0296] There are two nozzles 466 on a line extending in the sweepingdirection, that is, a sweeping line and each nozzle discharges two-dotequivalent, wherein one dot refers to two droplets 8. Therefore, onerecessed portion is filled with eight droplets 8 discharged from twonozzles 466. The missing-dot detector 487 checks whether missing dot hasoccurred, every series of sweeping.

[0297] When no missing dot is detected, the head unit 420 is shifted apredetermined distance in the shifting direction, and discharge of thefilter element material 13 is repeated while the pedestal supporting themother substrate 12 is moved in the sweeping direction. Thus, the filterelements 3 are formed in predetermined filter-element-forming regions 7in a predetermined color filter-forming region 11.

[0298] The mother substrate 12 onto which the R-color filter elementmaterial 13 is discharged is taken out from the liquid discharge device405R by the carrier robot, not shown in the drawings, and is heated at120° C. for 5 minutes in a multi-step baking oven, not shown in thedrawings, to dry the filter element material 13. After drying, themother substrate 12 is taken out from the multi-step baking oven by thecarrier robot and carried while being cooled down. Then, the mothersubstrate 12 is carried from the liquid discharge device 405R to theG-color liquid discharge device 405G and subsequently the B-color liquiddischarge device 405B, and the G- and B-color filter element materials13 are discharged in predetermined filter-element-forming regions 7, asin the R-color filter element formation. In this instance, one of thethree types of filter element material is discharged in a sweepingdirection different from that for the other two types of filter elementmaterials by, for example, changing the orientation of the mothersubstrate 12, as described above. The mother substrate 12 onto which thethree types of filter element material 13 are discharged and dried issubjected to heat treatment to cure and fix the filter element material13 (step 6 in FIG. 39).

[0299] The substantially entire surface of the mother substrate 12having the completed filter elements 3 is covered with a protectivelayer 4. Furthermore, an ITO electrode layer 5 is patterned on thesurface of the protective layer 4. Then, the mother substrate 12 is cutinto pieces by the color-filter-forming region 11 to form a plurality ofcolor filters 1 (step 7 in FIG. 39). The resulting substrate 12 havingthe color filter 1 is used as one of the pair of substrates in a liquidcrystal device as shown in FIG. 18, as described in the embodiment.

[0300] (Effects of the Color Filter Manufacturing Device)

[0301] In addition to the effects described in the foregoingembodiments, the present embodiment shown in FIGS. 27 to 39 have thefollowing effects.

[0302] In the present embodiment, a plurality of ink jet heads 421 inwhich a plurality of nozzles 466 for discharging the filter elementmaterial 13 acting as liquid ink are arranged on the surface thereofoppose an object, that is, the mother substrate 12, with a predeterminedspace therebetween. While these ink jet heads 421 are relatively movedalong the surface of the mother substrate 12, an identical type offilter element material 13 is discharged onto the surface of the mothersubstrate 12 from the nozzles 466 of the plurality of ink jet head 421.As a result, the filter element material 13 can be discharged in a widearea of mother substrate 12 using, for example, ink jet heads 421 havingsubstantially the same specifications. This means that it is notnecessary to use a special ink jet head having a large length. Insteadof the special product, a plurality of standardized products can beemployed, and costs are reduced. Such a long ink jet head has a lowyield, and thus expensive. In contrast, short ink jet head 421 has ahigh yield. In the present invention, a plurality of short ink jet headssubstantially constitute a long ink jet head, thus remarkably reducingcosts.

[0303] In addition, by appropriately selecting the arrangement, that is,the alignment or the number, of the ink jet heads 421 or the number ofor intervals between the discharge nozzles 466 (intervals may beadjusted to correspond to the pitch of pixels by using the nozzles 466at intervals of one or several nozzles), the filter element material 13can be discharged to desired regions according to the size, pitch of thepixels, arrangement, and the like of the color filter 1. Thus, thepresent invention enhances the versatility of ink jet heads.

[0304] By using a plurality of ink jet heads 421 having substantiallythe same shape and by appropriately arranging them, a liquid materialcan be discharged to desired regions, even if only one type of ink jetheads is used. Thus, the structure of equipment is simplified,manufacturing efficiency can be increased, and further costs can bereduced.

[0305] Also, by using the ink jet head 421 having nozzles 466 aligned ina line at substantially identical intervals, a desired structure havinga regularly arranged pattern, such as striped arrangement, mosaicarrangement, or delta arrangement, can be drawn.

[0306] In the present embodiment, a plurality of ink jet head 421 arerelatively moved along the surface of the mother substrate 12 in adirection parallel to the direction of the substantially linearalignment of the nozzles 466 which is tilted so as to intersect thesweeping direction in which the ink jet heads 421 should be moved.Therefore, the alignment direction of the nozzles 466 of the pluralityof the ink jet heads 421 is tilted with respect to the sweepingdirection in which the ink jet heads 421 are moved along the surface ofthe mother substrate 12. As a result, the pitch of the discharged filterelement material 13 becomes smaller than that between the nozzles. Thus,an excellent display device displaying finer images can be achieved whenthe resulting mother substrate 12 onto which the filter element material13 has been discharged is used for electro-optic display devices, suchas liquid crystal panels. In addition, interference between the adjacentink jet heads 421 can be prevented and, thus, miniaturization can beeasily achieved. By selecting the tilt angle, drawing dot pitches can beappropriately set and, thus, versatility is increased.

[0307] Furthermore, in the structure of the ink jet head 421 in whichthe nozzles 466 are aligned in a line at substantially identicalintervals, by aligning the nozzles 466 in the longitudinal direction ofthe ink jet head 421, the ink jet head 421 can be miniaturized. Thus,interferences between the adjacent ink jet heads 421 and between the inkjet head and other parts can be prevented.

[0308] By arranging a plurality of the ink jet heads 421 on the carriage426 to structure the head unit 420 such that the alignments of thenozzles 466 are parallel to one another, a plurality of droplets of anidentical liquid material can be easily discharged in one region withoutusing a special ink jet head having a large length. Also, different inkjet heads 421 can repeatedly discharge the filter element material 13 toone region. Consequently, the discharge quantity for each region can beeasily uniformized and, thus, stable, excellent drawing can be achieved.

[0309] By tilting the plurality of ink jet head 421 such that thelongitudinal direction thereof intersects the sweeping direction X, andby arranging the nozzles 466 such the alignments of the nozzles 466extend to a direction different from that of the longitudinal directionof the ink jet head 421 so that all the alignments of the nozzles 466are parallel to one another, the discharge area can be easily increasedwithout preparing a special ink jet head having a large length. Inaddition, by tilting the alignment direction of the nozzles 466 so as tointersect the sweeping direction, the pitch of the discharged filterelement material 13 becomes smaller than that between the nozzles 466without interference between the adjacent ink jet heads 421. Thus, finerimages can be achieved when the resulting mother substrate 12 onto whichthe filter element material 13 has been discharged is used for displaydevices or the like. By selecting the tilt angle, drawing dot pitchescan be appropriately set and, thus, versatility is increased.

[0310] By arranging the plurality of ink jet heads 421 in asubstantially staggered manner in a plurality of lines, for example, twolines, the filter element material 13 can be continuously,satisfactorily discharged and thus drawn without interference betweenthe adjacent ink jet heads 421 or without forming regions notdischarging the filter element material 13′ between the ink jet heads,even if commercially available ink jet head 421 are used, instead of aspecial ink jet head 421 having a large length.

[0311] In the present embodiment, the plurality of ink jet heads 421 inwhich a plurality of nozzles 466 for discharging the filter elementmaterial 13 acting as a liquid material, such as ink are arranged on thesurface thereof oppose an object, that is, the mother substrate 12, witha predetermined space therebetween. While these ink jet heads 421 arerelatively moved along the surface of the mother substrate 12, thefilter element material 13 is discharged such that a plurality of, forexample, two, nozzles 466 on a line extending in the relative directionof the movement discharge the material. As a result, two differentnozzles 466 can repeatedly discharge the filter element material 13 toone region. Therefore, even if there is a variation of the ink dischargequantity between the plurality of nozzles 466, the quantity ofdischarged filter element material 13 can be uniformized, and, thus,nonuniformity can be prevented and horizontally uniform discharge can beachieved. Thus, an electro-optic device having two-dimensionallyuniform, satisfactory characteristics can be achieved.

[0312] In the present embodiment, the plurality of ink jet heads 421 inwhich a plurality of nozzles 466 for discharging the filter elementmaterial 13 are arranged on the surface thereof oppose an object, thatis, the mother substrate 12, with a predetermined space therebetween.While these ink jet heads 421 are relatively moved along the surface ofthe mother substrate 12, the filter element material 13 is dischargedsuch that some nozzles located in predetermined regions X at both endsof the alignments of the nozzles 466, which may be 10 nozzles from eachend of the nozzle alignments, do not discharge the filter elementmaterial 13 and the other nozzles in the middle of the nozzle alignmentdischarge the filter element material 13. Since ten nozzles 466 fromeach end of the nozzle alignments whose discharge quantity isparticularly larger do not discharge the filter element material 13 andthe other nozzles 466 in the middle of the alignment whose dischargequantity is relatively uniform discharge the filter element material 13,horizontally uniform discharge can be performed on the mother substrate12, thus resulting in a color filter 1 having horizontally uniformquality. Consequently, by using this color filter 1 for an electro-opticdisplay device, excellent images can be displayed.

[0313] Also, the nozzles 466 having a discharge quantity 10% or morelarger than an average discharge quantity are not allowed to dischargethe filter element material 13. Consequently, nonuniformity does notoccur, even if functional liquid materials, such as EL materials andfunctional liquid materials containing charged particles forelectrophoretic device, as well as the filter element material 13 forthe color filter 1 are used as a liquid material. Thus, Satisfactorycharacteristics for electro-optic devices, such as liquid crystaldevices and EL devices, can be ensured.

[0314] Since the filter element material 13 is discharged in an amountof the average discharge quantity ±10% from the nozzles 466, relativelyuniform discharge quantity is ensured and a uniform amount of the filterelement material 13 can be discharged onto the surface of the mothersubstrate 12. Thus, an electro-optic device having excellentcharacteristic can be achieved.

[0315] In addition, the missing-dot detector 487 observes the dischargeof the filter element material 13 from the nozzles 466, and, therefore,unevenness of the discharged filter element material 13 can beprevented. Thus, stable, satisfactory drawing of the liquid material canbe ensured by such discharge.

[0316] The missing-dot detector 487 has an optical sensor which detectsthe passage of the filter element material 13 from a directionintersecting the direction in which the filter element material 13 isdischarged. Therefore, the stable state of the discharged filter elementmaterial 13 can be recognized by a simple structure even duringoperation. Thus, unevenness of the discharged filter element material 13can be prevented to ensure stable, satisfactory drawing of the filterelement material 13.

[0317] The missing-dot detector 487 observes the discharge of the filterelement material 13 before and after the nozzles 466 discharge thefilter element material 13 onto the mother substrate 12. Therefore, thestate of the discharged filter element material 13 can surely berecognized and, thus, missing-dots can be reliably prevented to ensurestable, satisfactory drawing of the filter element material 13. Thisobservation may be performed either before or after the discharge.

[0318] The missing-dot detector 487 is disposed at a head unit 420sweeping direction side. Therefore, the distance through which the headunit 420 moves so that the state of the discharged filter elementmaterial 13 is observed can be reduced, and the head unit 420 canmaintain the movement in the sweeping direction. Thus, missing-dots canbe efficiently detected with a simple structure.

[0319] The ink jet heads 421 are disposed in two lines in a symmetricalmanner with respect to a point. Consequently, the supply pipes 478 forsupplying the filter element material 13 can be bundled up to thevicinity of the head units 420, and thus, ease of assembling andmaintenance can be ensured. The electric wires 442 for controlling theink jet heads 421 run from both sides of the head units 420, thuspreventing the generation of electric noise to ensure stable,satisfactory drawing.

[0320] Each ink jet head. 421 is disposed at one end of the rectangularprint board 435 and the connector 441 is disposed at the other end.Consequently, a plurality of ink jet head 421 can be arranged in a linewithout interference of connectors 441, and, thus, miniaturization canbe achieved. In addition, the region where the nozzles 466 in thesweeping direction do not exist is not formed and a continuous alignmentof the nozzles 466 can be obtained without using a special ink jet headhaving a large length.

[0321] The connector 441 is disposed at the opposite side in asymmetrical manner with respect to a point. Consequently, electricnoises are eliminated and, thus, stable, satisfactory drawing can beachieved.

[0322] Similar effects to these effects in the embodiment can beobtained in the other embodiments described above, as long as they havethe same structure.

[0323] [Display Device (Electro-Optic Device) Including EL Elements andMethod for Manufacturing the Same]

[0324] A display device (electro-optic device) and a method formanufacturing the device will now be illustrated with reference todrawings. In this embodiment, an active matrix display device includingEL display elements is described for an electro-optic display device.First, the structure of the display device to be manufactured will beillustrated before a description of the method for manufacturing thedisplay device.

[0325] (Structure of the Display Device)

[0326]FIG. 40 is an equivalent circuit showing some of the organic ELdevices included in an electro-optic device. FIG. 41 is an enlarged planview of the plan structure of a display dot (pixel region) in a displaydevice. The display device is an active matrix display device 501 usingEL display devices, or EL devices, as shown in FIG. 40. The displaydevice 501 includes a plurality of scanning lines 503, a plurality ofsignal lines 504 extending to intersect the scanning lines 503, andcommon power lines 505 extending in parallel with the signal lines 504,on a transparent display substrate 502. Pixel regions (display dots)501A are disposed at the intersections of the scanning lines 503 and thesignal lines 504.

[0327] A data driving circuit 507 including a shift register, a levelshifter, a video line, and an analog switch is disposed for the signallines 504. A scanning line driving circuit 508 including a shiftregister and a level shifter is disposed for the scanning lines 503.Each pixel region 501A has a switching thin-film transistor 509 whosegate electrode receives scanning signals supplied from the correspondingscanning line 503, a storage capacitor cap for storing a image signalsupplied from the corresponding signal line 504 through the switchingthin-film transistor 509, a current thin-film transistor 510 whose gateelectrode receives the image signal supplied from the storage capacitorcap, a pixel electrode 511 for receiving a driving current from thecommon power line 505 when the pixel electrode 511 is connected to thecommon power line 505 through the current thin-film transistor 510, anda luminescent element 513 between the pixel electrode 511 and areflection electrode 512.

[0328] When the switching thin-film transistor 509 is activated bydriving the scanning line 503, the electric potential of the signal line504 at that time is held in the storage capacitor cap. According to thestate of the storage capacitor cap, the on/off state of the currentthin-film transistor 510 is determined. Thus, a current flows from thecommon power line 505 to the pixel electrode 511 through the channel ofthe current thin-film transistor 510, and further flows to thereflection electrode 512 through the luminescent element 513. Thus, theluminescent element 513 emits light according to the current.

[0329] As shown FIG. 41, in which the reflection electrode 512 and theluminescent element 513 are omitted from the pixel region 501A, the foursides of the rectangular pixel electrode 511 in plan view is surroundedby the signal line 504, the common power line 505, the scanning line503, and another scanning line 503, not shown in the drawing, foranother pixel electrode 511.

[0330] Steps of a process for manufacturing an active matrix displaydevice using the EL display devices will now be described. FIGS. 42 to44 sectional views showing the steps of, a process for manufacturing anactive matrix display device using the EL display elements.

[0331] First, as shown in FIG. 42(A), a silicon oxide protective baselayer, not shown in the drawing, is deposited at a thickness of about2000 to 5000 Å on the transparent display substrate 502, if necessary,by plasma CVD using a material gas, such as tetraethoxysilane (TEOS) oroxygen. Next, the display substrate 502 is heated to about 350° C., anda semiconductor layer 520 a, which is an amorphous silicon film, isdeposited at a thickness of about 300 to 700 Å on the surface of theprotective base layer by plasma CVD. Then, the semiconductor layer 520 ais crystallized into a polysilicon layer by laser annealing, solid phasedeposition, or the like. In laser annealing, a line beam having a lengthof 400 nm is used at an output intensity of about 200 mJ/cm² with, forexample, an excimer laser. The line beam is scanned such that the areathereof in the width direction having an intensity equivalent to 90% ofthe peak value of the laser intensity overlaps from one region toanother.

[0332] Then, as shown in FIG. 42(B), the semiconductor layer 520 a ispatterned in an island form to form the semiconductor layer 520 b. Asilicon oxide or nitride gate insulating layer 521 a is deposited at athickness of about 600 to 1500 Å on the surface of the display substrate502 having the semiconductor layer 520 b by plasma CVD using a materialgas, such as TEOS or oxygen gas. The semiconductor layer 520 b isintended to serve as a channel region and source/drain regions of thecurrent thin-film transistor 510, and it is also intended to serve as achannel region and source/drain regions of the switching thin-filmtransistor 509 in a sectional view at a different position. Hence, theswitching thin-film transistor 509 and the current thin-film transistor510 are formed at one time by the same procedure in the process shown inFIGS. 42 to 44. Only the current thin-film transistor 510 will thereforebe described in the following, and the description for the switchingthin-film transistor 509 is omitted.

[0333] Then, a conductive layer is formed of a metal, such as aluminium,tantalum, molybdenum, titanium, or tungsten by sputtering, followed bypatterning to form the gate electrode 510A shown in FIG. 41, as shown inFIGS. 42(C). In this state, high-temperature phosphorus ions areimplanted and, thus, source/drain regions 510 a and 510 b are formed inthe semiconductor layer 520 b for the gate electrode 510A by selfaligning. The region into which dopant is implanted results in thechannel region 510 c.

[0334] Turning to FIG. 42(D), after an insulating interlayer 522 isdeposited, contact holes 523 and 524 are formed, followed by fillingjunction electrodes 526 and 527 in the contact holes 523 and 524.

[0335] Then, as shown in FIG. 42(E), the signal line 504, the commonpower line 505, and scanning line 503 (not shown in FIG. 42) are formedon the insulating interlayer 522. The signal line 504, the common powerline 505, and the scanning line 503 are formed to a sufficiently largethickness without considering the thickness required for wiring.Preferably, the thickness of the lines is about 1 to 2 μm. The junctionelectrode 527 and the lines may be formed in the same step. In thisinstance, the junction electrode 526 is formed of ITO described later.

[0336] Then, an insulating interlayer 530 is deposited so as to coverthe surfaces of the wires and a contact hole 532 is formed at a positioncorresponding to the junction electrode 526. An ITO layer is depositedto fill the contact hole 532, and the ITO layer is patterned to form thepixel electrode 511 electrically connected to the source/drain regions510 a, in a predetermined regions surrounded by the signal line 504, thecommon power line 505, and the scanning lines 503.

[0337] Optical materials will be selectively disposed in the regionbetween the signal line 504 and the common power line 505 in FIG. 42(E).The boundaries between this region and its surroundings have steps 535because of the signal line 504 and the common power line 505.Specifically, the region between the signal line and the common powerline is lower than its surroundings, thus forming U-shaped steps 535.

[0338] Next, a functional liquid material, or EL material, is dischargedonto the display substrate 502 treated as above by ink jetting.Specifically, as shown in FIG. 43(A), a luminescent material 540A,acting as the functional liquid precursor, solved in a solvent isdischarged for forming a hole injection layer 513A which will be a lowerlayer of the luminescent element 140, onto the upturned surface of thedisplay substrate 502 by ink jetting using the device according to theforegoing embodiment. Thus, the luminescent material 540A is selectivelyapplied to the region between the steps 535.

[0339] Exemplary optical materials 540A for the hole injection layer513A include polyphenylene vinylene, whose precursor ispolytetrahydrothiophenylphenylene,1,1-bis(4-N,N-ditolylaminophenyl)cyclohexane, andtris(8-hydroxyquinolinol)aluminum.

[0340] The liquid optical material 540A has a high fluidity and tends tohorizontally spread. However, the steps 535 surrounding the region ontowhich the optical material 540A is discharged prevents the opticalmaterial 540A from spreading over the steps 535 unless the dischargequantity per time is excessively large, as in the filter elementmaterial 13 discharged onto the region surrounded by the barrier wallsin the foregoing embodiment.

[0341] The optical material 540A is heated or exposed to light tovaporize the solvent, thus forming the solid, thin hole injection layer513A on the pixel electrode 511, as shown in FIG. 43(B). The steps shownin (A) and (B) of FIG. 43 are repeated several times so that the holeinjection layer 513A has a sufficient thickness, as shown in FIG. 43(C).If a plurality of droplets are discharged to form the hole injectionlayer, by sweeping the head in at least two different directions (forexample, perpendicular to each other) to discharge the optical material,unevenness of the material can be reduced.

[0342] Next, as shown in FIG. 44(A), an organic fluorescent opticalmaterial 540B, acting as a functional liquid, solved in a solvent isdischarged for forming an organic semiconductor layer 513B which will bethe upper layer of the luminescent element 513, onto the upturnedsurface of the display substrate 502 by ink jetting using the deviceaccording to the foregoing embodiment. Thus, the organic fluorescentoptical material 540B is selectively applied to the region between thesteps 535. This optical material 540B is also prevented from spreadingover the steps 535, as in the optical material 540A.

[0343] Exemplary optical materials 540B for the organic semiconductorlayer 513B include cyanopolyphenylene vinylene, polyphenylene vinylene,polyalkylphenylene,2,3,6,7-tetrahydro-11-oxo-1H,5H,11H-(1)benzopyrano[6,7,8-ij]-quinolizine-10-carboxylicacid, 1,1-bis-(4-N,N-ditolylaminophenyl)cyclohexane,2-(13,4′-dihydroxyphenyl)-3,5,7-trihydroxy-1-benzopyrylium perchlorate,tris(8-hydroxyquinolinol)aluminum,2,3,6,7-tetrahydro-9-methyl-11-oxo-1H,5H,11H-(1))benzopyrano[6,7,8-ij]-quinolizine,aromatic diamine derivatives (TDP), oxadiazol dimer (OXD), oxadiazolederivatives (PBD), distyrylarylene derivatives (DSA), quinolinol metalcomplex, beryllium-benzoquinolinol complex (Bebq), triphenylaminederivatives (MTDATA), distyryl derivatives, pyrazoline dimer, rubrene,quinacridone, triazole derivatives, polyphenylene, polyalkylfluorene,polyalkylthiophene, azomethine zinc complex, porphyrin zinc complex, andbenzoxazole zinc complex, phenanthroline europium complex.

[0344] Next, the optical material 540B is heated or exposed to light tovaporize the solvent, thus forming the solid, thin organic semiconductorlayer 513B on the hole injection layer 513A, as shown in FIG. 44(B). Thesteps shown in (A) and (B) of FIG. 44 are repeated several times so thatthe organic semiconductor layer 513B has a sufficient thickness, asshown in FIG. 44(C). If a plurality of droplets are discharged to formthe organic semiconductor layer, or EL layer, by sweeping the head in atleast two different directions (for example, perpendicular to eachother) to discharge the optical material, unevenness of the material canbe reduced.

[0345] The hole injection layer 513A and the organic semiconductor layer513B constitute the luminescent layer 513. Finally, the reflectionelectrode 512 is formed on the entire surface of the display substrate502 or in a striped manner, as shown in FIG. 44(D), and thus the displaydevice 501 is completed. The hole injection layer and the organicsemiconductor layer (EL layer) are formed by discharging the materialsin different sweeping directions from each other. Thus, unevenness ofdisplay resulting from unevenness of the discharged materials can bereduced, as in above.

[0346] By applying ink jetting as described above to the embodimentshown in FIGS. 40 to 44, the same effects can be obtained. Furthermore,the selectively discharged functional liquid materials can be preventedfrom spreading to the surroundings, and thus, highly precise patterningcan be achieved.

[0347] The embodiment shown in FIGS. 40 to 44 illustrates an activematrix display device using the EL display elements, intended to displaycolor images. However, the structure shown in FIGS. 40 to 44 can beapplied to a monochrome display device, as shown in FIG. 45.

[0348] Specifically, the organic semiconductor layer 513B may bedeposited all over the surface of the display substrate 502. Even inthis case, since the hole injection layer 513A must be selectivelydisposed in predetermined regions in order to prevent crosstalk, it isextremely advantageous to use the steps 111. In FIG. 45, the same partsas in the embodiment shown in FIGS. 40 to 44 are designated by the samereference numerals.

[0349] Also, the display device using the EL display elements are notlimited to the active matrix type, but it may be a passive matrix type,as shown in FIG. 46. FIG. 46 shows EL devices included in anelectro-optic device of the present invention. FIG. 46(A) is a plan viewof the arrangement of a plurality of first bus wires 550 and a pluralityof second bus wires 560 intersecting the first bus wires at rightangles; and FIG. 46(B) is a sectional view taken along line B-B in FIG.46(A). The same parts in FIG. 46 as in the embodiment shown in FIGS. 40to 44 are designated by the same reference numeral and the descriptionis not repeated. The steps of the manufacturing process are also thesame as in the embodiment shown in FIGS. 40 to 44, and the drawing anddescription are therefore omitted.

[0350] In the display device shown in FIG. 46, an insulating layer 570,such as a SiO₂ film, is disposed so as to surround the region where theluminescent element 513 is deposited, thus forming the steps 535 betweenthe region and the surroundings. Consequently, a selectively dischargedfunctional liquid material can be prevented from spreading to thesurroundings, and thus, highly precise patterning can be achieved.

[0351] The active matrix display device is not limited to the structureshown in FIGS. 40 to 44. Any of the structures shown in FIGS. 47, 48,49, 50, 51, and 52 may be employed.

[0352] In the display device shown in FIG. 47, highly precise patterningis ensured by using the pixel electrode 511 to form the steps 535. FIG.47 is a sectional view of a step midway through the process formanufacturing a display device. Its upstream and downstream steps aresubstantially the same as in the embodiment shown in FIGS. 40 to 44 andthe drawings and description are therefore omitted.

[0353] In the display device shown in FIG. 47, the pixel electrode 511has a thickness larger than that of conventional electrodes, thusforming steps 535 between the region and the surroundings. Specifically,in the display device shown in FIG. 47, the pixel electrode 511, wherean optical material is to be applied later, has a height larger thanthat of the surroundings to form protrusion serving as steps. Then, anoptical material 540A which is a precursor for forming a hole injectionlayer 513A acting as the lower layer of luminescent elements 513 isdischarged on the surface of the pixel electrode 511 by ink jetting, asin the embodiment shown in FIGS. 40 to 44.

[0354] In this instance, unlike the embodiment shown in FIGS. 40 to 44,the display substrate 502 is turned upside down; hence, the surface ofthe pixel electrode 511 onto which the optical material 540A is appliedfaces downward, and, in this state, the optical material 540A isdischarged. As a result, the optical material 540A remains on the uppersurface (bottom surface in FIG. 47) of the pixel electrode 511 and,thus, does not spread to its surroundings due to the gravity and surfacetension. The optic material is then heated or exposed to light to becured, thus forming a thin hole injection layer 513A by repeating thisdischarge. The organic semiconductor layer 513B is also formed by thesame technique. Thus, by using the protruding steps, highly precisepatterning can be achieved. The optical materials 540A and 540B may beapplied by making use of an inertial force, such as centrifugal force,instead of using gravity or surface tension.

[0355] The display device shown in FIG. 48 is also an active matrixdisplay device. FIG. 48 is a sectional view of a step midway through theprocess for manufacturing a display device. Its upstream and downstreamsteps are substantially the same as in the embodiment shown in FIGS. 40to 44 and the drawings and description are therefore omitted.

[0356] In the display device shown in FIG. 48, first, the reflectionelectrode 512 is formed on the display substrate 502, and then theinsulating layer 570 is deposited so as to surround the regions wherethe luminescent layer 513 will be disposed. Thus, the surrounded regionsbecome lower than the surroundings, and thus, U-shaped steps 535 areformed.

[0357] The optical materials 540A and 540B, which are functional liquidmaterials, are discharged onto the region surrounded by the steps 535 byink jetting to form luminescent elements 513, as in the embodiment shownin FIGS. 40 to 44.

[0358] On the other hand, scanning lines 503, signal lines 504, pixelelectrodes 511, switching thin-film transistors 509, current thin-filmtransistors 510, and an insulating interlayer 530 are formed on adelamination layer 581 on the delamination substrate 580. Finally, thestructure removed from the delamination layer 581 on the delaminationsubstrate 580 is transferred onto the display substrate 502.

[0359] By the modification shown in FIG. 48, damages to the scanninglines 503, the signal lines 504, the pixel electrodes 511, the switchingthin-film transistors 509, current thin-film transistors 510, andinsulating interlayer 530 from the application of the optical materials540A and 540B can be alleviated. This structure can be used for apassive matrix display element.

[0360] The display device shown in FIG. 49 is also an active matrixdisplay device. FIG. 49 is a sectional view of a step midway through theprocess for manufacturing a display device. Its upstream and downstreamsteps are substantially the same as in the embodiment shown in FIGS. 40to 44 and the drawings and description are therefore omitted.

[0361] In the display device shown in FIG. 49, U-shaped steps 535 areformed by using the insulating interlayer 530. As a result, using theinsulating interlayer 530, the manufacturing process can be preventedfrom increasing the number of steps and, thus, becoming complicated.When the insulating interlayer 530 is formed of SiO₂, the resultingsurface thereof may be exposed to ultraviolet or plasma of O₂, CF₃, Ar,or the like. Then the surface of the pixel electrode 511 may be exposedand the liquid optical materials 540A and 540B are selectivelydischarged. Thus, water-repellent regions are formed along the surfaceof the insulating interlayer 530, and both these water-repellent regionsand the steps 535 facilitate the settlement of the optical materials540A and 540B in the predetermined regions.

[0362] In the display device shown in FIG. 50, the regions where theoptical materials 540A and 540B are applied have an affinity for waterhigher than that of the surroundings, so that the optical materials 540Aand 540B do not spread to the surroundings. FIG. 50 is a sectional viewof a step midway through the process for manufacturing a display device.Its upstream and downstream steps are substantially the same as in theembodiment shown in FIGS. 40 to 44 and the drawings and description aretherefore omitted.

[0363] In the display device shown in FIG. 50, after the insulatinginterlayer 530 is formed, an amorphous silicon layer 590 is formed onthe surface of the insulating interlayer 530. Since the amorphoussilicon layer 590 is more water-repellent than ITO of the pixelelectrode 511, the pixel electrode 511 becomes more hydrophilic than itssurroundings. The optical materials 540A and 540B, which are functionalliquid materials, are selectively discharged onto the upper surface ofthe pixel electrode 511 by ink jetting to form the luminescent elements513, as in the embodiment shown in FIGS. 40 to 44 and, finally, thereflection electrode 512 is formed.

[0364] The structure shown in FIG. 50 is also applied to the passivematrix display device. This manufacturing process may include the stepof transferring a structure formed on a delamination layer 581 on alamination substrate 580 to the display substrate 502, as in themodification shown in FIG. 48.

[0365] Water-repellent regions and hydrophilic regions may bedistributed by using a metal, an anodized film, an insulating film, suchas polyimide or silicon, or other materials. In the case of a passivematrix display device, such a distribution may be formed with the firstbus electrode 550; in the case of an active matrix display device, it isformed with the scanning lines 503, signal lines 504, the pixelelectrodes 511, the insulating layer 530 or the light-shielding films 6b.

[0366] In the display device shown in FIG. 51, attraction of a potentialor repulsive force is used, instead of using the steps 535 orwater-repellent/hydrophilic distribution, in order to increase thepatterning precision. FIG. 51 is a sectional view of a step midwaythrough the process for manufacturing a display device. Its upstream anddownstream steps are substantially the same as in the embodiment shownin FIGS. 40 to 44 and the drawings and description are thereforeomitted.

[0367] In the display device, by activating the signal lines 504 andcommon power lines 505 and appropriately switching transistors, notshown in the drawing, the pixel electrode 511 becomes at a negativepotential and the insulating interlayer 530 becomes at a positivepotential. A positively charged liquid optical material 540A isselectively discharged onto predetermined regions by ink jetting. Sincethe optical material 540A is positively charged, electric charges aswell as spontaneous polarization can be used and patterning precisionis, thus, further increased.

[0368] The structure shown in FIG. 51 is also applied to the passivematrix display device. This manufacturing process may include the stepof transferring a structure formed on a delamination layer 581 on alamination substrate 580 to the display substrate 502, as in themodification shown in FIG. 48.

[0369] In this modification, potentials are applied to both the pixelelectrode 511 and the surrounding insulating interlayer 530. However, itis not limited to this, and only the insulating interlayer 530 may begiven a positive potential, but not to the pixel electrode 511. Then,the positively charged liquid optical material 540A is applied. In thismodification shown in FIG. 52, since the liquid optical material 540A issurely maintained at a positive potential even after being discharged,the repulsive force between optical material 540A and the surroundinginsulating interlayer 530 prevents the liquid optical material 540A fromspreading to the surroundings with reliability.

[0370] [Structure of Liquid Discharge Means]

[0371] Other structures of the liquid discharge means capable of beingapplied to the above described embodiments will now be illustrated. Thefollowing structures each include a liquid discharge unit in which aplurality of liquid discharge head 22 are arranged and fixed together ina predetermined pattern. By using such a liquid discharge unit,efficient discharge can be achieved, according to various types ofobject without upsizing the structure of the liquid discharge heads 22or preparing a plurality of types of liquid discharge head 22. Aplurality of structures will now be illustrated with reference todrawings.

[0372] (Structure 1)

[0373]FIG. 55 is a schematic plan view of the structure of a liquiddischarge unit according to Structure 1 of the present invention. InStructure 1, a plurality of liquid discharge heads 22, as described inthe foregoing embodiments, are aligned in a line in the direction ofextension of the nozzle lines 28 (28A and 28B in the drawing). Theplurality of liquid discharge heads 22 are mounted on a sub carriages25. The liquid discharge heads 22 are aligned at predetermined intervalsin the direction in which the nozzle lines 28 extend, and accordingly,there are intervals s, which have no nozzle 27, between the nozzle lines28 each having a discharge width t of the liquid discharge head 22.Preferably, the interval s and the discharge width t of the liquiddischarge head 22 are the same.

[0374] The liquid discharge unit 25U has a center of rotation 25 a onwhich the sub carriage 25 rotates, in the sub carriage 25. For example,the sub carriage 25 is attached in the head unit 26 described in theforegoing embodiments so as to be able to rotate on the center ofrotation 25 a, and is oriented such that the entire liquid dischargeunit is tilted in a direction forming a tilt angle θ with respect to thedirection (shifting direction Y) perpendicular to the sweeping directionX. Preferably, the center of rotation 25 a is positioned in the centerof the sub carriage 25, as shown in the drawing.

[0375] The liquid discharge heads 22 are precisely positioned withrespect to an alignment origin point 25 o provided on the sub carriage25 and fixed to the sub carriage 25. Preferably, the alignment originpoint 25 o is provided at both ends of the sub carriage 25 in the nozzleline 28 extending direction. The alignment origin point 25 o may be aminute mark formed by a printing pattern.

[0376]FIG. 56 shows a state in which the liquid discharge unit 25Uoperates on a substrate 12. The substrate (mother substrate) 12 haspattern-forming regions (unit regions) 11, as in above, arrayedlengthwise and crosswise. While the liquid discharge unit 25 is sweptover the substrate 12, as in the foregoing embodiments, the nozzles ofthe liquid discharge heads 22 discharge droplets. In this instance, thedroplets are discharged in the regions corresponding to the regions ofthe liquid discharge head 22 having the width t, but not in the regionscorresponding to the regions having the intervals s, during a series ofsweeping. Accordingly, another series of sweeping must be performed todischarge liquid to the untreated regions. For example, after a seriesof sweeping ST1 is performed from the position of the liquid dischargeunit 25U at the top of the drawing, the liquid discharge unit 25U isshifted δy in the shifting direction Y, as shown in the bottom of thedrawing and, then, another series of sweeping (ST2) is performed again.Preferably, δy is equivalent to the discharge width t or the interval s.In particular, the relationship expressed by δy=t=s in the case of t=S,the two series of sweepings ST1 and ST2 can eliminate untreated regions.In this instance, the tilt angle θa of the liquid discharge unit 25U forsweeping in the width direction M of the substrate 12 and the tilt angleθb for sweeping in the longitudinal direction L of the substrate 12 maybe different from each other, according to the difference between thecycles of the pattern arrangement in the width direction M and thelongitudinal direction L of the substrate 12, as shown in FIGS. 57A and57B.

[0377] In the present embodiment as well as the foregoing embodiments,by sweeping the liquid discharge unit 25U in both the width direction Mand the longitudinal direction L, unevenness of film formation can bereduced. Alternatively, whether sweeping is performed in the widthdirection or the longitudinal direction of the substrate 12 may beselected according to the efficiency of operation.

[0378] Also, the error variance method may be applied to this structure,as in the foregoing embodiments. In this instance, while the liquiddischarge unit is shifted a predetermined distance in the shiftingdirection Y, series of sweeping are repeated. For this purpose, forexample, a process of performing the series of sweeping ST1 and ST2 isdefined as a set, and a plurality of sets are performed while shifted inthe shifting direction Y. Alternatively, series of sweeping ST1 areperformed while shifted in the shifting direction Y, and then series ofsweeping ST2 are performed while shifted in the shifting direction Y.

[0379] (Structure 2)

[0380] A liquid discharge unit according to Structure 2 will now bedescribed with reference to FIG. 58. The liquid discharge unit 25V hasthe same structure as in Structure 1 in that a plurality of liquiddischarge head 22 are aligned at predetermined intervals; the liquiddischarge heads 22 have a similar structure; and the sub carriage 25 hasan alignment origin point 25 o, and the description for the same partsis omitted. However, the liquid discharge unit 25V is different fromStructure 1 in that each liquid discharge head 22 can be rotated withrespect to the sub carriage 25. Also, the intervals between the liquiddischarge heads 22 are changeable.

[0381] The sub carriage 25 has a guide 25 c extending in thelongitudinal direction thereof and movable mounting members 25 d alongthe guide 25 c. Each liquid discharge head 22 is mounted so as torotate, with respect to the mounting member 25 d, on a center of therotation 22 a. More specifically, the guide 25 c is formed in a recessedgroove or a protruded line. The mounting members 25 d are fitted to theguide 25 c so as to slide along the guide 25 c. The position of themounting members 25 d can be adjusted with adjusting means, such asmicrometer. The liquid discharge head 22 are rotatable with respect tothe corresponding mounting member 25 d, and the orientation thereof isadjusted at a tilt angle θ, if necessary, with adjusting means, such asa micrometer.

[0382] Structure 2 is the same as Structure 1 in that the regions havinga discharge width t of the liquid discharge heads 22 are aligned atintervals s. In structure 1, however, the liquid discharge heads 22 arefixed to the sub carriage 25 and the tilt angle θ is set by rotating thesub carriage 25 on the whole, so that the liquid discharge heads 22 aredisposed over a wide area in the sweeping direction. As a result, theliquid discharge heads 22, particularly away from the center of rotation25 a, must be swept with a long useless sweeping distance after start ofseries of sweeping or before end of the series. In contrast, inStructure 2, since each liquid discharge head 22 can rotate with respectto the sub carriage 25 to form a predetermined tilt angle θ, such anuseless sweeping distance is substantially eliminated. Thus, the uselesssweeping distance and consequently stroke of the movement can bereduced.

[0383] Since, in Structure 2, the liquid discharge heads 22 mounted onthe sub carriage 25 are rotated to set the tilt angle θ, the intervalsbetween the liquid discharge heads 22 must be varied according tochanges of the tilt angle θ, in order to maintain the ratio of thedischarge width t of the liquid discharge heads 22 to the intervals sconstant. For example, when the substantial discharge width t and theinterval s are set equivalent to each other, the interval s mustequivalent t·cos θ in the case where the tilt angle is not 0 though theinterval s is equivalent to the discharge width s in the case where thetilt angle is 0. Accordingly, the liquid discharge heads 22 are shiftedalong the guide 25 c to adjust the intervals according to the tilt angleθ so as to satisfy s=t·cos θ.

[0384] (Structure 3)

[0385] A liquid discharge unit 25W according to Structure 3 will now bedescribed with reference to FIG. 59. The liquid discharge unit 25W isthe same as that of Structures 1 and 2 in that a plurality of liquiddischarge heads 22 are used, but the manner of arrangement is different.The liquid discharge heads 22 of Structure 3 are mounted on the subcarriage 25, as well. However, the liquid discharge heads 22 ofStructure 3 is arranged in two lines such that one line is displaced inthe direction perpendicular to the direction of the nozzle lines 28 (28Aand 28B) (in the standard direction S described above). Hence the liquiddischarge heads 22 are arranged in staggered manner and, thus, theliquid discharge unit 25W, on the whole, has a continuous nozzlealignment. Specifically, the regions having the discharge width t of theliquid discharge heads 22 in one line and the regions having thedischarge width t of the liquid discharge heads 22 in the other line areadjacent to each other.

[0386] The liquid discharge unit 25W of Structure 3 can therefore serveas if it had a continuous single nozzle line aligned in an integratedliquid discharge head. As a result, additional liquid discharge headshaving a different number of nozzles are not necessary, and only byusing a plurality of conventional liquid discharge heads 22, the numberof nozzles can be increased. Also, since the structure does not have theintervals s as in Structures 1 and 2, additional series of sweeping arenot necessary to discharge liquid to untreated regions corresponding tothe regions having the intervals s.

[0387] In Structure 3 as well as Structure 1, the liquid discharge unit25W may be rotated on a center of rotation to set a predetermined tiltangle θ. Alternatively, each of the liquid discharge heads 22 may berotated with respect to the sub carriage 25 and capable oftranslationally sliding so that the tilt angle θ can be set apredetermined value and the intervals between the liquid discharge heads22 can be set according to the set tilt angle θ.

[0388] [Film Formation Pattern on Object]

[0389] A film formation pattern on the mother substrate 12, acting as anobject, in the foregoing embodiments and structures will now beillustrated. FIG. 60 is a fragmentary enlarged plan view of a filmformation pattern on the mother substrate 12. The mother substrate 12has pattern-forming regions (unit regions) 11, as in above, arrayedlengthwise and crosswise, and the pattern-forming regions 11 each have aplurality of regions 7 in an arrangement pattern therein. When thepattern-forming regions 11 are separated into color filter substrates,the regions 7 act as the filter element regions in which desired filterelements, such as R (red), G (green), and B (blue), are arrayed in adesired arrangement, such as striped arrangement, delta arrangement, oroblique mosaic arrangement. When the pattern-forming regions 11 areseparated into EL devices or plasma display panels, the regions 7 act asthe display dots in which a luminescent layer or a fluorescent materialis arrayed in a desired pattern.

[0390] In the mother substrate 12, the interval Dx between thepattern-forming regions 11 in the X direction (for example, the widthdirection M) is set to be positive integral multiple of the arrangementcycle dx, in the X direction, of the regions 7 in each pattern-formingregion 11. The interval Dy between the pattern-forming regions 11 in theY direction (for example, the longitudinal direction L) is set to bepositive integral multiple of the arrangement cycle dy, in the Ydirection, of the regions 7 in each pattern-forming region 11. As aresult, liquid can be discharged in the plurality of pattern-formingregions 11 at one time from nozzles 27 aligned at regular intervals, andthus, more efficient manufacturing can be achieved.

[0391] (Modifications)

[0392] While the present invention has been illustrated using preferredembodiments thereof, the invention is not limited to those embodiments,and includes the following modifications and others in form and detailwithout departing from the scope and object of the invention.

[0393] Specifically, in the device for manufacturing a color filter(liquid discharge device) shown in FIGS. 8 and 9, while the liquiddischarge head 22 is swept over the mother substrate 12 by moving theliquid discharge head 22 in the sweeping direction X, the mothersubstrate 12 is shifted by the shifting driver 21 so that the liquiddischarge head 22 is shifted relative to the mother substrate 12.Alternatively, the mother substrate 12 may be moved to perform sweepingand the liquid discharge head 22 may be shifted. Furthermore, anytechnique can be applied, as long as at least one of the liquiddischarge head 22 and the mother substrate 12 is shifted relative to theother and the liquid discharge head 22 is moved along the surface of themother substrate 12 relative to the mother substrate 12. For example,the mother substrate 12 may be shifted, but not liquid discharge head22, or both may be shifted in relatively opposite directions.

[0394] The liquid discharge means (ink jet head) 421 for discharging inkmakes use of deformation of a piezoelectric element in the embodiment.However, different types of ink jet head having other structures, suchas the type which may discharge ink by bubbles generated by heating maybe used.

[0395] The ink jet head 421 of the embodiment shown in FIGS. 27 to 37has nozzles 466 aligned in two lines at substantially regular intervals.However, the number of nozzle lines is not limited to two, and otherplurality of numbers may be used. The intervals between the nozzles maynot be regular or the nozzles may not be aligned in line.

[0396] The liquid discharge heads 16 and 401 are used for manufacturingthe color filter 1, the liquid crystal device 101, the EL device 201,but not limited to these. The liquid discharge heads 16 and 401 may beused for electron emission devices such as FEDs (field emissiondisplays); PDP (plasma display panel); electrophoretic devices, in whicha functional liquid ink containing charged particles is discharged inrecessed portions of pixels partitioned by barrier walls and the pixelsdisplay images by applying a voltage to electrodes separated by thepixels to collect the charged particles to one electrode side;low-profile Braun tubes; CRT (cathode-ray tube) displays; and othervarious display devices (electro-optic devices) in which predeterminedlayers are deposited on a substrate.

[0397] The devices of the present invention include color filters anddisplay devices (electro-optic devices) having a substrate (base). Themethods of the present invention is applied to various processes formanufacturing these devices in which droplets 8 are discharged onto thesubstrate (base). For example, the present invention may be applied tothe structures in which a liquid metal, a conductive material, a paintcontaining a metal is discharged by ink jetting to form electric wireson a print circuit board; fine microlenses are discharged onto asubstrate by ink jetting to form an optical member; a resist is appliedonto a desired portion of a substrate by ink jetting; andlight-scattering protrusions or a fine white pattern is formed on alight-transmissive substrate such as resin by ink jetting to form alight-scattering plate. Also, the present invention may be applied tothe structure in which RNA (ribonucleic acid) is discharged onto spikespots arranged on a DNA (deoxyribonucleic acids) chip by ink jetting toform a fluorescent label probe and hybridization is performed on the DNAchip; and other biochip formation in which, for example, a sample, anantibody, DNA (deoxyribonucleic acids), or the like is discharged inregions partitioned in a dot manner on a substrate, by ink jetting.

[0398] The present invention may be applied to liquid crystal devices101 including active matrix liquid crystal panels having activeelements, such as TFTs, other transistors, and TFDs, in which ink isdischarged in recessed regions defined by barrier walls 6 surroundingpixel electrodes by ink jetting to form a color filter 1; an inkcontaining a color material and a conductive material is discharged onpixel electrodes to form a color filter 1 acting as conducive colorfilter; spacers in a grain form are discharged by ink jetting to hold agap between substrates, and other structures of electro-optic systemsfor the liquid crystal devices 101.

[0399] The present invention is not limited to using for the colorfilter 1 and may be applied to the EL device 201 and other electro-opticdevices. The EL device 201 may be a striped type having ELscorresponding to three colors R, G and B arranged in a striped manner;an active matrix type having transistors for controlling current appliedto the luminescent films from one pixel to another; a passive matrixtype; or other structures.

[0400] The electro-optic devices of the present invention areincorporated in various electronic apparatuses including personalcomputers 490 as shown in FIG. 53, portable phone such as cellulartelephones 491, as shown in FIG. 54, and PHSs (personal handy phonesystems), electronic notebooks, pagers, POS (point of sales) terminals,IC cards, mini disc players, liquid crystal projectors, engineering workstations (EWS), word processors, TV sets, viewfinder-type andmonitor-direct-view-type video tape recorders, electronic calculators,car navigation systems, apparatuses having touch panels, watches, andgame machines.

[0401] Concrete structures and procedures of the present invention maybe changed within the scope of the invention. For example, the ink jetheads 421 described with reference to FIGS. 28, 36, and 37 are arrangedin one direction. However, one of the two alignments may be oriented inthe direction rotated 90° with respect to the tilt angle of the otheralignment so as to form a tapered shape at a right angle with eachother. Alternatively, the adjacent ink jet heads in one alignment mayform tapered shapes at a right angle with each other. Variousmodifications may be made as long as they do not depart from the spiritof the invention.

[0402] The method and device for forming a film of the present inventioncan be widely used for forming a film on the surface of a desiredobject. For example, when a film is uniformly formed on the surface ofan object, by discharging a plurality of droplets one by one in at leasttwo different directions along the sweeping direction, unevenness of thefilm formation resulting from the sweeping direction can be reduced.Exemplary films include photosensitive resist films and protectivecoating films. Also, the present invention can be used for formingvarious types of structure on the surface of an object, as well asforming a simple film. For example, columnar spacers may be dispersed onthe surface of an object by the method of the invention. A substratehaving such columnar spacers may be used for liquid crystal displaydevices and input pads.

[0403] According to the present invention, by discharging droplets of aliquid material in at least two different sweeping directions relativeto the object, the material can be efficiently discharged onto varioustypes of object. By setting the sweeping direction in at least twodifferent directions relative to the object, unevenness of filmformation resulting from the sweeping direction can be reduced.

BRIEF DESCRIPTION OF THE DRAWINGS

[0404]FIG. 1 is a schematic plan view of a major step of a method formanufacturing a color filter according to an embodiment of the presentinvention.

[0405]FIG. 2 is a schematic plan view of a major step of a method formanufacturing a color filter according to another embodiment of thepresent invention.

[0406]FIG. 3 is a schematic plan view of a major step of a method formanufacturing a color filter according to still another embodiment ofthe present invention.

[0407]FIG. 4 is a schematic plan view of a major step of a method formanufacturing a color filter according to a further embodiment of thepresent invention.

[0408]FIG. 5 is a plan view of a color filter and a mother substrate ofthe color filter according to an embodiment of the present invention.

[0409]FIG. 6 is a schematic sectional view showing steps of a method formanufacturing the color filter, taken along line VI-VI in FIG. 5(a).

[0410]FIG. 7 is an illustration of display dot arrangements of R, G, andB colors.

[0411]FIG. 8 is a perspective view of a liquid discharge deviceaccording to an embodiment of the present invention, which is a majorpart of a liquid discharge device, a color filter manufacturing device,devices for manufacturing various types of device, such as a liquidcrystal device and an EL device, according to the present invention.

[0412]FIG. 9 is an enlarged perspective view of a major part of thedevice shown in FIG. 8.

[0413]FIG. 10 is an enlarged perspective view of an ink jet head, whichis a major part of the device shown in FIG. 9.

[0414]FIG. 11 is a perspective view of an ink jet head according to amodification.

[0415]FIG. 12 is an illustration of the internal structure of the inkjet head, and (a) is a fragmentary perspective view and (b) is asectional view taken along line J-J in (a).

[0416]FIG. 13 is a plan view of an ink jet according to a modification.

[0417]FIG. 14 is a block diagram of an electric control system used inthe ink jet head shown in FIG. 8.

[0418]FIG. 15 is a flow chart of control exercised by the control systemshown in FIG. 14.

[0419]FIG. 16 is a perspective view of an ink jet according to anothermodification.

[0420]FIG. 17 is a process chart of a method for manufacturing a liquidcrystal device according to an embodiment of the present invention.

[0421]FIG. 18 is an exploded perspective view of a liquid crystal devicemanufactured according to a method of the present invention formanufacturing a liquid crystal device.

[0422]FIG. 19 is a sectional view of the liquid crystal device takenalong line IX-IX in FIG. 18.

[0423]FIG. 20 is a process chart of a method for manufacturing an ELdevice according to an embodiment of the present invention.

[0424]FIG. 21 is a sectional view of an EL device corresponding to theprocess chart shown in FIG. 20.

[0425]FIG. 22 is plan views (a) and (b) showing postures of a mothersubstrate on a table of a liquid discharge device according to anembodiment of the present invention.

[0426]FIG. 23 is plan views (a) and (b) showing other postures of amother substrate on a table of a liquid discharge device.

[0427]FIG. 24 is a schematic illustration of a constitution of amanufacturing apparatus including a plurality of liquid dischargedevices.

[0428]FIG. 25 is schematic plan views (a) to (c) showing a manner ofchanging orientations of a mother substrate during operation of a liquiddischarge device.

[0429]FIG. 26 is schematic plan views (a) and (b) showing another mannerof changing orientations of a mother substrate during operation of aliquid discharge device.

[0430]FIG. 27 is a fragmentary perspective view of a liquid dischargedevice included in a color filter manufacturing device of the presentinvention.

[0431]FIG. 28 is a plan view of a head unit of the liquid dischargedevice.

[0432]FIG. 29 is a side view of the liquid discharge device.

[0433]FIG. 30 is a front view of the liquid discharge device.

[0434]FIG. 31 is a sectional view of the liquid discharge device.

[0435]FIG. 32 is an exploded perspective view of a head device of theliquid discharge device.

[0436]FIG. 33 is an exploded perspective view of an ink jet head of theliquid discharge device.

[0437]FIG. 34 is a schematic illustration of discharge of a filterelement material from the ink jet head.

[0438]FIG. 35 is a schematic illustration of the discharge quantity of afilter element material from the ink jet head.

[0439]FIG. 36 is a schematic illustration of an arrangement of the inkjet heads.

[0440]FIG. 37 is a fragmentary enlarged schematic illustration of anarrangement of the ink jet heads.

[0441]FIG. 38 is a schematic illustration of a color filter manufacturedby the color filter manufacturing device, and (A) is a plan view of thecolor filter and (B) is a sectional view taken along line X-X in (A).

[0442]FIG. 39 is a sectional view showing steps of manufacturing thecolor filter.

[0443]FIG. 40 is a circuit diagram partially showing a display deviceusing EL display elements according to an electro-optic device of thepresent invention.

[0444]FIG. 41 is an enlarged plan view of a pixel region of the displaydevice.

[0445]FIG. 42 is a sectional view showing steps of pretreatment in aprocess of manufacturing the display device.

[0446]FIG. 43 is a sectional view showing steps of discharging an ELmaterial in a process of manufacturing the display device.

[0447]FIG. 44 is a sectional view showing steps of discharging an ELmaterial in a process of manufacturing the display device.

[0448]FIG. 45 is an enlarged sectional view showing a plan view of apixel region of a display device using EL display elements according toan electro-optic device of the present invention.

[0449]FIG. 46 is an enlarged view of a pixel region of a display deviceusing EL display elements according to an electro-optic device of thepresent invention, and (A) is a plan view and (B)is a sectional viewtaken along line B-B in (A).

[0450]FIG. 47 is a sectional view showing a process of manufacturing adisplay device using EL display elements according to an electro-opticdevice of the present invention.

[0451]FIG. 48 is a sectional view showing a process of manufacturing adisplay device using EL display elements according to an electro-opticdevice of the present invention.

[0452]FIG. 49 is a sectional view showing a process of manufacturing adisplay device using EL display elements according to an electro-opticdevice of the present invention.

[0453]FIG. 50 is a sectional view showing a process of manufacturing adisplay device using EL display elements according to an electro-opticdevice of the present invention.

[0454]FIG. 51 is a sectional view showing a process of manufacturing adisplay device using EL display elements according to an electro-opticdevice of the present invention.

[0455]FIG. 52 is a sectional view showing a process of manufacturing adisplay device using EL display elements according to an electro-opticdevice of the present invention.

[0456]FIG. 53 is a perspective view of a personal computer, which is anelectronic apparatus including the electro-optic device.

[0457]FIG. 54 is a perspective view of a cellular telephone, which is anelectronic apparatus including the electro-optic device.

[0458]FIG. 55 is a plan view of a liquid discharge unit in whichplurality of liquid discharge heads are arranged.

[0459]FIG. 56 is a schematic illustration of a technique using a liquiddischarge unit.

[0460]FIG. 57A is a schematic illustration of a posture of a liquiddischarge unit to a substrate 12.

[0461]FIG. 57B is a schematic illustration of a posture of a liquiddischarge unit to a substrate 12.

[0462]FIG. 58 is a plan view of a liquid discharge unit in which aplurality of liquid discharge heads are arranged.

[0463]FIG. 59 is a plan view of a liquid discharge unit in which aplurality of liquid discharge heads are arranged.

[0464]FIG. 60 is a schematic illustration of an arrangement ofpattern-forming regions on a mother substrate.

[0465]FIG. 61 is an illustration of a known method for manufacturing acolor filter.

[0466]FIG. 62 is a schematic illustration of a characteristic of a knowncolor filter.

REFERENCE NUMERALS

[0467]1, 118: color filter

[0468]2, 107 a, 107 b: substrate acting as an object

[0469]3: filter element

[0470]12: mother substrate acting as a substrate

[0471]13: filter element material acting as a liquid material

[0472]16: liquid discharge device (color filter manufacturing device)

[0473]19, 425: sweeping driver constituting shifting means (headsweeping means)

[0474]21, 427: shifting driver constituting shifting means (headshifting means)

[0475]25: carriage acting as means for holding a liquid discharge head

[0476]27, 466: nozzle

[0477]49: table acting as means for holding an object

[0478]101: liquid crystal device acting as an electro-optic device

[0479]102: liquid crystal panel acting as an electro-optic device

[0480]111 a, 111 b: base acting as an object

[0481]114 a, 114 b: electrode

[0482]201: EL device acting as an electro-optic device

[0483]202: pixel electrode

[0484]204: transparent substrate acting as a substrate

[0485]213: opposing electrode

[0486]405R (405G, 405B): color filter manufacturing device acting as aliquid discharge device

[0487]421: ink jet head acting as a liquid discharge head

[0488]426: carriage acting as holding means

[0489]501: display device acting as an electro-optic device

[0490]502: display substrate acting as an object

[0491]540A, 540B: optical material acting as a functional liquidmaterial

[0492] L: liquid crystal

[0493] M: filter element material

1] A method for forming a film by discharging a liquid material onto thesurface of an object with a liquid discharge means, the methodcomprising: a first sweeping step of discharging a plurality of dropletsof the liquid material onto the surface of the object while the liquiddischarge means sweeps over the object in a first direction with respectto the object, along the surface of the object; and a second sweepingstep of discharging a plurality of droplets of the liquid material ontothe surface while the liquid discharge means sweeps over the object in asecond direction different from the first direction with respect to theobject, along the surface of the object. 2] A method for forming a filmaccording to claim 1, wherein the object is rotated to be oriented in adirection different from one sweeping step to the other so that thefirst direction and the second direction intersect each other withrespect to the object. 3] A film forming device comprising: liquiddischarge means for discharging droplets of a liquid material onto thesurface of an object; and shifting means for relatively moving theobject and the liquid discharge means, along the surface of the object,wherein the liquid discharge means is relatively moved in at least twodirections with respect to the object along the surface of the object,and the liquid discharge means discharges the droplets one after anotherwhile moving in any direction of said at least two directions. 4] A filmforming device according to claim 3, further comprising orientationmeans for orienting the object in at least two directions by rotatingthe object. 5] A liquid discharge device for discharging a liquidmaterial onto an object, comprising: a liquid discharge head fordischarging the liquid material; shifting means for relatively movingthe liquid discharge head and the object in a direction along thesurface of the object, the liquid discharge head and the object opposingeach other; and orientation means for horizontally orienting the object,wherein the orientation means is capable of horizontally orienting theobject in at least two different directions. 6] A liquid dischargedevice according to claim 5, wherein the orientation means comprises aplurality of observing means for observing different portions of theobject, and some of the observing means are used for observing theobject in one orientation and the other observing means are used forobserving the object in the other orientation. 7] A liquid dischargedevice for discharging a liquid material onto an object, comprising: aliquid discharge head for discharging the liquid material; shiftingmeans for relatively moving the liquid discharge head and the object ina direction along the surface of the object, the liquid discharge headand the object opposing each other; and orientation means forhorizontally orienting the object, wherein the sweeping direction inwhich the liquid discharge head moves while discharging the liquidmaterial onto the object and the orientation of the object oriented bythe orientation means have at least two orientation relationships. 8] Aliquid discharge device according to claim 7, wherein the orientationmeans comprises a plurality of observing means for observing differentportions of the object, and some of the observing means are used in oneorientation relationship and the other observing means are used in theother orientation relationship. 9] A liquid discharge device fordischarging a liquid material onto an object to form a film, comprising:a liquid discharge head for discharging the liquid material; shiftingmeans for relatively moving the liquid discharge head and the object ina direction along the surface of the object, the liquid discharge headand the object opposing each other; and orientation means forhorizontally orienting the object, wherein the sweeping direction inwhich the liquid discharge head moves while discharging the liquidmaterial onto the object is changed with respect to the orientation ofthe object oriented by the orientation means, during operation. 10] Aliquid discharge device according to claim 9, wherein the orientationmeans comprises a plurality of observing means for observing differentportions of the object, and some of the observing means are used beforethe sweeping direction is changed and the other observing means are usedafter the sweeping direction is changed. 11] A liquid discharge deviceaccording to claim 10, wherein the observing means is capable ofobserving a plurality of portions of the object. 12] A method formanufacturing a color filter in which filter elements are formed bydischarging a liquid material onto an object, the method comprising: afirst discharge step of continuously discharging droplets of the liquidmaterial onto the object, in a first sweeping direction; and a seconddischarge step of continuously discharging droplets of the liquidmaterial onto the object, in a second sweeping direction different fromthe first sweeping direction. 13] A method for manufacturing a colorfilter according to claim 12, wherein, in the first discharge step,first filter elements having a first color are formed in a first regionof the object; and wherein, in the second discharge step, second filterelements having a second color different from the first color are formedin a second region of the object, different from the first region. 14] Amethod for manufacturing a color filter according to claim 13, whereinthe filter elements comprise three types of filter elements having threecolors, and one type of the filter elements, having one color exhibitingthe strongest color shading resulting from the sweeping direction isdischarged in one of the discharge steps and the other types having theother two colors are discharged in the other discharge step. 15] Amethod for manufacturing a color filter according to claim 12, whereineach of the filter elements is formed of a plurality of droplets of theliquid material, and some of the plurality of droplets are discharged inthe first discharge step and the other droplets are discharged in thesecond discharge step. 16] A display device comprising a color filterhaving filter elements formed by discharging a liquid material onto anobject, wherein the color filter includes droplets of the liquidmaterial which are continuously discharged in a plurality of sweepingdirections. 17] A display device according to claim 16, wherein thefilter elements comprise a plurality of types of filer elements havingdifferent colors from each other, the types of filter elements beingformed by continuously discharging droplets of the liquid material insweeping directions different from each other. 18] A display deviceaccording to claim 17, wherein the filter elements comprise three typesof filter elements having three colors, and one type of the filterelements having one color exhibiting the strongest color shadingresulting from the sweeping direction is discharged in a sweepingdirection different from the sweeping direction in which the othertypes, having the other two colors, are discharged. 19] A display deviceaccording to claim 16, wherein the filter elements are formed by mixingdroplets of the liquid material which are continuously discharged indifferent sweeping directions. 20] A display device according to claim16, further comprising a liquid crystal panel, wherein the color filterand the liquid crystal panel are laid one upon the other. 21] A displaydevice according to claim 16, further comprising an EL layer, whereinthe color filter and the EL layer are laid one upon the other. 22] Anelectronic apparatus comprising a display device as set forth in claim16. 23] A method for manufacturing a display device having steps fordischarging a liquid material onto a substrate to form a filmcomprising: a first discharge step of continuously discharging dropletsof a liquid material onto an substrate, in a first sweeping direction;and a second discharge step of continuously discharging droplets of theliquid material onto the substrate, in a second sweeping directiondifferent from the first sweeping direction. 24] A method formanufacturing a display device according to claim 23, wherein dischargeddroplets of the liquid material form display dots. 25] A method formanufacturing a display device according to claim 24, wherein each ofthe display dots is formed of a plurality of droplets of the liquidmaterial, and some of the plurality of droplets are discharged in thefirst discharge step and the other droplets are discharged in the seconddischarge step. 26] A display device comprising display dots formed bydischarging a liquid material onto an object, wherein the display dotseach include droplets of the liquid material which are continuouslydischarged in a plurality of sweeping directions. 27] A display deviceaccording to claims 26, wherein the display dots are formed by mixingdroplets of the liquid material which are continuously discharged indifferent sweeping directions. 28] An electronic apparatus comprising adisplay device as set forth in claim 26.